Methods and devices for adjusting an image plane location on an offner elay
AssigneeApplied Materials, Inc.
InventorDavid Arthur MARKLE
Life of this patent
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Abstract
A method and apparatus for a device, including an object position mirror capable of transmitting a light, a first image position mirror disposed substantially diagonal to the object position mirror and capable of relaying the light, the first image position mirror configured to move along an axial direction, a relay mirror disposed substantially adjacent to the first image position mirror and capable of reflecting the light, the relay mirror configured to move along the axial direction, and a second image position mirror disposed substantially diagonal to the relay mirror and capable of reflecting the light.
Claims22
A device, comprising:
- an object position mirror capable of transmitting a light;
- a first image position mirror disposed substantially diagonal to the object position mirror and capable of relaying the light, the first image position mirror configured to move along an axial direction;
- a relay mirror disposed substantially adjacent to the first image position mirror and capable of reflecting the light, the relay mirror configured to move along the axial direction;
- and
- a second image position mirror disposed substantially diagonal to the relay mirror and capable of reflecting the light.
A device, comprising:
- a set of adjustable roof mirrors capable of relaying light, a first portion of the set of the adjustable roof mirrors disposed adjacent to and substantially facing a first primary mirror, and a second portion of the set of the adjustable roof mirrors disposed adjacent to and substantially facing a second primary mirror;
- one or more sensors capable of producing a measurement of a distance between the set of the adjustable roof mirrors and an image plane;
- and
- an adjustment motor coupled to the set of the adjustable roof mirrors, the adjustment motor capable of adjusting an axial position of the set of the adjustable roof mirrors based on the measurement.
A method for relaying light, comprising:
- measuring a distance between a set of adjustable roof mirrors and an image plane, the set of the adjustable roof mirrors capable of relaying and reflecting a light, a first portion of the set of the adjustable roof mirrors disposed adjacent to and substantially facing a first primary mirror, and a second portion of the set of the adjustable roof mirrors disposed adjacent to and substantially facing a second primary mirror;
- and
- adjusting an axial position of the set of the adjustable roof mirrors based on the distance.
Dependencies are inferred from the claim text.