Supporting plate, manufacturing method thereof and substrate processing device having the same

A method of manufacturing a support plate, the method comprising:

• processing each of an upper plate and a lower plate, respectively, the lower plate having a lower groove formed on an upper surface to form an inner flow path and a plurality of penetration holes formed in a partial region of the lower groove corresponding to each of the inflection points of the inner flow path;
• blazing a lower face of the upper plate and an upper face of the lower plate to form a support plate with an internal space;
• performing a first surface treatment of the internal space through the penetration holes;
• filling the penetration holes through a stopper member;
• and
• performing a second surface treatment on an outer surface of the support plate filled with the penetration holes by the stopper member.

A substrate processing device comprising:

• an index module transferring a substrate from a container accommodating the substrate and receiving a processed substrate back into the container;
• a processing module performing coating process and developing process on the substrate, receiving the substrate accommodated in the container from the index module, and performing a substrate processing process;
• and
• a plurality of buffer modules partially disposed between the index module and the processing module,
• wherein the buffer module comprises:
• a frame having a rectangular parallelepiped shape with an empty inside, and a buffer unit disposed inside the frame to temporarily store the substrate during a process of processing the substrate,
• wherein the buffer unit comprises a housing having an empty space therein, a support plate on which the substrate is disposed, and a connection block positioned between the support plates and fixedly coupled to the support plates,
• wherein each of the support plates comprises:
• an upper plate;
• a lower plate having a formed inner flow path, disposed to face the upper plate, and having a plurality of penetration holes formed corresponding to each of the inflection points of the inner flow path;
• and
• a stopper member inserted into the penetration hole in a state in which the upper plate and the lower plate are bonded to each other.