Mems component
AssigneeRobert Bosch GmbH
InventorsChristoph Schelling, Jochen Reinmuth
Life of this patent
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Abstract
A MEMS component. The MEMS component includes: a substrate having a cavity and a base, an interaction element arranged above the cavity and connected to the base, including a bending beam, a boundary layer at a distance from the bending beam via connecting elements and defining a hollow space with the bending beam, and a backplate within the hollow space, the backplate being stiffer in relation to the boundary layer and the bending beam, at least one electrode, which forms a readable capacitance with a back electrode of the backplate, to capacitively detect a deflection of at least one of the bending beam, the connecting elements and the boundary layer, at least one stop element, configured to be displaced into a mechanical stop.
Claims23
A MEMS component (101, 301, 501, 701, 801), in particular an acoustic transducer or a pressure sensor, comprising:
- a substrate (103) having a cavity (105) and a base (107), an interaction element (109) arranged above the cavity (105) and connected to the base (107),
- wherein the interaction element (109) comprises a bending beam (111),
- a boundary layer (115) arranged at a distance from the bending beam (111) via connecting elements and defining a hollow space (113) with the bending beam (111), and
- a backplate (119) located within the hollow space (113), which comprises a back electrode, wherein the backplate (119) is designed to be stiffer in relation to the boundary layer (115) and the bending beam (111),
- at least one electrode, which forms a readable capacitance with the back electrode of the backplate (119), in order to capacitively detect a deflection of at least one of the bending beam (111), the connecting elements and the boundary layer (115),
- at least one stop element (133), which is configured to be displaced into a mechanical stop (135), wherein the stop element (133) in the stop (135) creates at least one fluid flow resistance, in particular a fluid seal, between the cavity (105) on a side facing the substrate and a volume on a side of the hollow space (113) facing away from the substrate.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the boundary layer (115) is anchored to the bending beam (111) via boundary walls or wherein the boundary layer (115) is designed as a further bending beam (111) and is connected directly to the base (107) via an insulation layer.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the connecting elements are formed from an electrically insulating material.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the connecting elements have a spring element that is mechanically anchored on one side to the bending beam (111) and/or to the boundary layer (115) or that is formed in two parts, wherein the two parts only come into contact with one another by a movement toward one another.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the boundary wall (121) is laterally undulating.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the backplate (119) is formed by an electrically conductive layer and/or by a dielectric.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the backplate (119) comprises an electrically insulating carrier layer on which one or more electrically insulated and electrically conductive regions are formed as back electrodes.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the backplate (119) has a flexible region at each of its edge regions, which is softer than a center region of the backplate (119).
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the stop element (133) comprises parts of one of the boundary layer (115), the bending beam (111) and the backplate (119).
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the stop element (133) has a corrugation.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein an insulating layer is provided between the stop element (133) and the stop (135).
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein a pressure equalization hole is provided in the stop element (133) and/or wherein a pressure equalization hole (139) is provided as a cylinder recess through the hollow space (113).
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the bending beam (111) has one or two beam ends secured to the substrate (103).
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein the boundary layer (115) is designed as a further bending beam (111) or as a membrane element.
The MEMS component (101, 301, 501, 701, 801) according to one of the preceding claims, wherein a further stop (135) is provided on a side of the stop element (133) opposite the stop (135).
Dependencies are inferred from the claim text.