# US 2025/0169332 A1 · Display device and method of fabrication for the same

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- Number: US 2025/0169332 A1
- Document ID: US20250169332A1
- Status: Published application
- Kind: A1
- Application number: 18/747,092
- Filed: 2024-06-18
- Published: 2025-05-22
- Earliest claimed: 2023-11-20
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., LTD.
- Inventors: So Young OH; Jong Woo KIM; Hyun Sup YOON; Woo Suk JUNG; Jae Heung HA
- Web page: https://patentgrep.com/patent/US20250169332A1

## CPC

- H10K 59/873: {Encapsulations}
- H10K 59/12: Active-matrix OLED [AMOLED] displays
- H10K 59/8731: {multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers}
- H10K 59/879: {comprising refractive means, e.g. lenses}
- H10K 2102/351: {Thickness}
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A display device includes a light emitting element layer disposed on a substrate, and an encapsulation layer including a first inorganic encapsulation layer, an organic encapsulation layer, and a second inorganic encapsulation layer sequentially stacked on the light emitting element layer. At least one of the first and the second inorganic encapsulation layer includes a first inorganic layer and a second inorganic layer disposed on the first inorganic layer, the second inorganic layer includes a first surface facing the first inorganic layer, and a second surface opposite to the first surface, a first film density in a region adjacent to the first surface of the second inorganic layer is greater than a second film density in a region adjacent to the second surface of the second inorganic layer, and a film density of the first inorganic layer is greater than the second film density of the second inorganic layer.

## Claims

### Claim 1

A display device comprising:
a light emitting element layer disposed on a substrate and comprising a plurality of light emitting elements; and
an encapsulation layer comprising a first inorganic encapsulation layer disposed on the light emitting element layer, an organic encapsulation layer disposed on the first inorganic encapsulation layer, and a second inorganic encapsulation layer disposed on the organic encapsulation layer, wherein
at least one of the first inorganic encapsulation layer and the second inorganic encapsulation layer comprises a first inorganic layer and a second inorganic layer disposed on the first inorganic layer,
the second inorganic layer comprises a first surface facing the first inorganic layer, and a second surface opposite to the first surface,
a first film density of the second inorganic layer in a region adjacent to the first surface of the second inorganic layer is greater than a second film density of the second inorganic layer in a region adjacent to the second surface of the second inorganic layer, and
a film density of the first inorganic layer is greater than the second film density of the second inorganic layer.

### Claim 2 (depends on 1)

The display device of claim 1, wherein a thickness of the first inorganic layer is in a range of about 3 Å to about 20 Å.

### Claim 3 (depends on 1)

The display device of claim 1, wherein the second inorganic layer further has a third film density, which is smaller than the first film density and greater than the second film density, between the first surface and the second surface.

### Claim 4 (depends on 3)

The display device of claim 3, wherein the second inorganic layer further comprises a region where a film density of the second inorganic layer decreases.

### Claim 5 (depends on 4)

The display device of claim 4, wherein the film density of the second inorganic layer decreases in a thickness direction.

### Claim 6 (depends on 4)

The display device of claim 4, wherein a thickness of the region where the film density of the second inorganic layer decreases is about 10 to about 50 times a thickness of the first inorganic layer.

### Claim 7 (depends on 4)

The display device of claim 4, wherein a thickness of the region where the film density of the second inorganic layer decreases is about 5% to about 40% of a total thickness of the second inorganic layer.

### Claim 8 (depends on 1)

The display device of claim 1, wherein a difference between the film density of the first inorganic layer and the second film density of the second inorganic layer is greater than or equal to about 0.5.

### Claim 9 (depends on 1)

The display device of claim 1, wherein each of the first inorganic layer and the second inorganic layer comprises silicon nitride.

### Claim 10 (depends on 1)

The display device of claim 1, wherein a refractive index of the first inorganic layer is greater than or equal to about 1.9.

### Claim 11 (depends on 10)

The display device of claim 10, wherein a refractive index of the second inorganic layer is in a range of about 1.7 to about 1.8.

### Claim 12 (depends on 1)

The display device of claim 1, wherein
the first inorganic encapsulation layer comprises the first inorganic layer and the second inorganic layer, and
a thickness of the first inorganic encapsulation layer is less than or equal to about 600 Å.

### Claim 13 (depends on 1)

The display device of claim 1, wherein
the second inorganic encapsulation layer comprises the first inorganic layer and the second inorganic layer, and
a thickness of the second inorganic encapsulation layer is less than or equal to about 1200 Å.

### Claim 14

A display device comprising:
a light emitting element layer disposed on a substrate and comprising a plurality of light emitting elements;
a first inorganic encapsulation layer comprising a first inorganic layer disposed on the light emitting element layer and a second inorganic layer disposed on the first inorganic layer;
an organic encapsulation layer disposed on the first inorganic encapsulation layer; and
an encapsulation layer comprising a second inorganic encapsulation layer comprising a third inorganic layer disposed on the organic encapsulation layer, and a fourth inorganic layer disposed on the third inorganic layer, wherein
the second inorganic layer comprises a region where a film density of the second inorganic layer decreases in a thickness direction, and
the fourth inorganic layer comprises a region where a film density of the fourth inorganic layer decreases in the thickness direction.

### Claim 15 (depends on 14)

The display device of claim 14, wherein
a film density of the first inorganic layer is greater than a maximum film density of the second inorganic layer, and
a film density of the third inorganic layer is greater than a maximum film density of the fourth inorganic layer.

### Claim 16 (depends on 14)

The display device of claim 14, wherein each of a water vapor transmission rate of the first inorganic encapsulation layer and a water vapor transmission rate of the second inorganic encapsulation layer is less than or equal to about 9*10−4 g/m2 day.

### Claim 17

A method of fabrication for a display device, comprising:
forming a light emitting element layer comprising a plurality of light emitting elements on a substrate;
forming a first inorganic encapsulation layer on the light emitting element layer;
forming an organic encapsulation layer on the first inorganic encapsulation layer; and
forming a second inorganic encapsulation layer on the organic encapsulation layer, wherein
the forming of the first inorganic encapsulation layer or the forming of the second inorganic encapsulation layer comprises:
forming a first inorganic layer at a first deposition rate; and
forming a second inorganic layer on the first inorganic encapsulation layer at a second deposition rate, and
the first deposition rate is less than the second deposition rate.

### Claim 18 (depends on 17)

The method of claim 17, wherein the forming of the second inorganic layer comprises allowing particles of the first inorganic layer to penetrate into the second inorganic layer.

### Claim 19 (depends on 17)

The method of claim 17, wherein the forming of the first inorganic layer and the forming of the second inorganic layer are performed using an aminosilane precursor.

### Claim 20 (depends on 19)

The method of claim 19, wherein the aminosilane precursor comprises at least one of cyclosilazane, trisilylamine, bis(diethylamino)silane (BDEAS), bis(t-butylamino)silane (BTBAS), tris(dimethylamino)silane, tris(isopropylamino)silane, tetrakis(dimethylamino)silane, tri(isopropyl)cyclotrisilazane, and tetramethyldisilazane.