Semiconductor devices including circuits under inductor (cul)
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Chun Chang, Hsieh-Hung Hsieh, Tzu-Jin Yeh, Jun-De Jin, Ching-Chung Hsu, Chung-Long Chang, Hua-Chou Tseng
Life of this patent
Estimating the term…
Abstract
Semiconductor device isolation is provided. In one aspect, a semiconductor device include a spiral inductor. The semiconductor device includes a patterned ground shield (PGS) electrically coupled with the spiral inductor. The semiconductor device includes a filter configured to exchange energy with the PGS. The semiconductor device includes a circuit vertically spaced from the inductor, the PGS disposed between the circuit and the spiral inductor.
Claims20
A semiconductor device comprising:
- a spiral inductor;
- a patterned ground shield (PGS) electrically coupled with the spiral inductor;
- a filter electrically coupled with the PGS;
- and
- a circuit vertically spaced from the spiral inductor, the PGS disposed between the circuit and the spiral inductor.
A system comprising:
- a first inductor, configured to operate at a frequency;
- a second inductor;
- and
- a capacitor comprising:
- a first conductive element of a patterned ground shield (PGS) electrically coupled with the first inductor;
- a second conductive element of the PGS;
- and
- a dielectric disposed between the first conductive element and the second conductive element, wherein
- the capacitor and the second inductor operatively form an LC cavity, the LC cavity configured to resonate at the frequency.
A method for fabricating a semiconductor device, comprising:
- forming a metallization layer over an active surface of a semiconductor substrate, the metallization layer comprising a first terminal of a patterned ground shield (PGS), the first terminal connected to a shunt resistor of a filter having a center frequency exceeding one GHz;
- and
- forming an inductor over the metallization layer, the inductor electrically coupled with the PGS.
Dependencies are inferred from the claim text.