Reduced form factor plasma windows positioned in a beam accelerator system

A beam accelerator system comprising:

• a plurality of beamlines each comprising a low-pressure chamber and an ion accelerator configured to generate an ion beam;
• a target chamber coupled to each of the plurality of beamlines such that the plurality of beamlines direct the ion beams into the target chamber;
• and
• a plurality of plasma window assemblies, each plasma window assembly interposed between and fluidly connecting a respective beamline of the plurality of beamlines and the target chamber, wherein each plasma window assembly comprises:
• an anode;
• and
• a plurality of cooling plates, each cooling plate comprising an aperture having an aperture axis that is aligned with an aperture axis of an aperture in one or more adjacent cooling plates to form a plasma channel, wherein one or more cooling plates of the plurality of cooling plates is a cathode plate comprising at least one cathode.

A method comprising:

• generating a plasma in a plasma channel of a plasma window assembly interposed between and fluidly connecting a beamline and a target chamber, wherein the beamline comprises a low-pressure chamber and an ion accelerator that generates an ion beam;
• and
• directing the ion beam through the plasma and into the target chamber, wherein:
• the plasma window assembly comprises:
• an anode;
• and
• a plurality of cooling plates, each cooling plate comprising an aperture having an aperture axis that is aligned with an aperture axis of an aperture in one or more adjacent cooling plates to form the plasma channel;
• and
• one or more cooling plates of the plurality of cooling plates is a cathode plate comprising at least one cathode.