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US 2025/0167759 A1Published application
Acoustic wave element, filter element, and communication apparatus
AssigneeKYOCERA Corporation
InventorsNaofumi KASAMATSU, Masahisa SHIMOZONO, Tetsuya KISHINO, Masaki NANBU, Hongnian LI, Tatsuya DOUMOTO
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Abstract
An acoustic wave element 1 according to the present disclosure includes a piezoelectric substrate 2 and an IDT electrode 3 on the piezoelectric substrate 2. The IDT electrode 3 includes a multilayer structure of a first layer 35 comprised of Al containing 10% or less of a sub-component and a second layer 37 comprised of a CuAl2 alloy. The second layer 37 enables the acoustic wave element 1 to have excellent electric power resistance.
Claims18
An acoustic wave element comprising:
- a piezoelectric substrate and
- an IDT electrode located on the piezoelectric substrate, the IDT electrode comprising:
- one or more first layers, wherein a first layer is any layer containing Al as a principal ingredient and not containing a CuAl2 alloy;
- and
- one or more second layers containing a CuAl2 alloy,
- wherein a ratio of a total thickness of all of the one or more second layers to a total thickness of all of the one or more first layers and all of the one or more second layers is 0.2 or more at a first position of an electrode finger of the IDT electrode.
3 more elements
An acoustic wave element comprising:
- a piezoelectric substrate;
- a Ti layer on the piezoelectric substrate;
- and
- an IDT electrode on the piezoelectric substrate, the IDT electrode comprising:
- two first layers, each containing Al as a principal ingredient and not containing a CuAl2 alloy, and
- a second layer containing a CuAl2 alloy;
- wherein first one of the two first layers is on the Ti layer,
- wherein second one of the two first layers is on the second layer
- wherein a ratio of a thickness of the second layer to a total thickness of the two first layers and the second layer is 0.2 or more at a first position of an electrode finger of the IDT electrode.
6 more elements
Dependencies are inferred from the claim text.