Method of using exhaust system and method of using process equipment

A method of using process equipment, the method comprising:

• heating a substrate in a process chamber, wherein heating the substrate produces a gas;
• exhausting the gas using an exhaust system connected to the process chamber, wherein the exhausting the gas comprises:
• passing the gas through a piping section, wherein the piping section has uniform inner diameter;
• resisting turbulence and condensation during passing the gas through the piping section using a plurality of smoothing layers on an inner diameter of the piping section;
• and
• regulating a flow of the gas into the piping section from the process chamber using a plurality of plates, wherein each of the plurality of plates extends perpendicular to an exhaust path from the process chamber to the exhaust system.

A method of using an exhaust structure, the method comprising:

• receiving a gas at an input section attached, wherein the input section comprises a curved portion configured to change a direction of gas passing through the exhaust structure, and the input section has a first diameter at a first location;
• directing the gas from the input section through a piping section, wherein the piping section has a second diameter in a central region of the piping section, the second diameter is uniform, the piping section has the second diameter at an inlet in direct contact with the central region, and the second diameter has a same value as the first diameter;
• and
• resisting turbulence during direction of the gas through the piping section using a plurality of smoothing layers on an inner surface of the piping section.