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US 2025/0166979 A1Published application
Apparatus, system and method to reduce crazing
AssigneeAdvanced Energy Industries, Inc.
InventorsJoshua B. Pankratz, Douglas PELLEYMOUNTER, Uwe Krause
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Abstract
A coating system that reduces parasitic currents that may cause crazing in coatings on a substrate. In one example, the system includes a pair of low impedance shunt paths to ground for parasitic AC currents generated from the plasma in the chamber. The low impedance shunts may be provided through a balanced triaxial connection between a power supply of each chamber and the magnetrons of each chamber. In another example, potential differences between adjacent chambers are minimized through synchronized power supply signals between chambers.
Claims21
(canceled)
A system comprising:
- a power supply including a first output and a second output;
- a first cable, the first cable comprising a first center conductor and a first conductive shield;
- a second cable, the second cable comprising a second center conductor and a second conductive shield;
- the first output coupled with the first center conductor and the second output coupled with the first conductive shield, the first output coupled with the second conductive shield and the second output coupled with the second center conductor;
- the first center conductor coupled with the second conductive shield to form a first terminal;
- and
- the first conductive shield coupled with the second center conductor to form a second terminal.
4 more elements
Dependencies are inferred from the claim text.