Automatic grid finger detection
AssigneeFEI Company
InventorsTomas Onderlicka, Jaroslav Stárek, Jamie Dee Gravell
Life of this patent
Estimating the term…
Abstract
Embodiments herein relate to sample support imaging and sample location identification at a sample support to be used for microscopy imaging. A system can comprise a memory that stores, and a processor that executes, computer executable components. The computer executable components can comprise a beam directing component that instructs a focused ion beam (FIB) device of a beam system to direct an ion beam at a sample support, and a field application component that affects secondary charged particles, emitted from the sample support due to the ion beam, by directing activation of a negative field from the beam system during application of the ion beam by the FIB device.
Claims20
A system, comprising:
- a memory that stores computer executable components;
- and
- a processor that executes the computer executable components stored in the memory, wherein the computer executable components comprise:
- a beam directing component that instructs a focused ion beam (FIB) device of a beam system to direct an ion beam at a sample support;
- and
- a field application component that affects secondary charged particles, emitted from the sample support due to the ion beam, by directing activation of a negative field from the beam system during application of the ion beam by the FIB device.
A computer-implemented method, comprising:
- scanning, by a system operatively coupled to a processor, a sample support with an ion beam of a focused ion beam (FIB) device of a beam system;
- generating, by the system, a repulsive charge that repulses, away from a detector of the beam system, a first set of secondary charged particles originating from the sample support based on the scanning;
- and
- allowing, by the system, a second set of secondary charged particles to be registered at the beam system despite the repulsive charge, the second set of secondary charged particles also originating from the sample support based on the scanning.
A computer program product facilitating a process for identification of an edge of a sample support by a system associated with a beam system comprising a focused ion beam (FIB) device and an electron microscope (EM), the computer program product comprising a computer readable storage medium having program instructions embodied therewith, and the program instructions executable by a processor to cause the processor to:
- register, by the processor, secondary charged particles originating from a sample support aligned relative to the FIB device and the EM;
- and
- generate, by the processor, an image of the sample support, based on the registering,
- wherein the image comprises a second region having a greater signal bounded by a first region having a lesser signal, and
- wherein a boundary between the first region and the second region corresponds to an edge of the sample support.
Dependencies are inferred from the claim text.