Beam manipulation using charge regulator in a charged particle system
AssigneeASML Netherlands B.V.
InventorsNing YE, Jian ZHANG, Zhonghua DONG, Datong ZHANG
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Abstract
A system and a method for controlling a beam spot of an Advanced Charge Controller module in an electron beam system. The Advanced Charge Controller module includes a MEMS mirror configured to steer and shape the beam in order to perform beam alignment, increase the power density at an area of interest and modulate the power density in real time.
Claims20
A charge regulator for a charged particle beam tool, comprising:
- a light source configured to emit a beam;
- a beam manipulator configured to manipulate the beam;
- and
- a controller configured to control the beam manipulator to adjust a property of a beam spot formed by the beam on a sample surface in relation to a charged particle beam projected on the sample surface.
A non-transitory computer readable medium storing a set of instructions that is executable by one or more processors of a charged-particle beam apparatus to cause the charged particle beam apparatus to perform a method comprising:
- emitting a beam from a light source;
- manipulating the beam with a beam manipulator to adjust a property of a beam spot formed by the beam on a sample surface in relation to a charged particle beam projected on the sample surface.
Dependencies are inferred from the claim text.