Propriety determination device and propriety determination method

A propriety determination device that determines whether a detecting operation of an information analysis device is proper, the information analysis device being configured to detect an abnormality in a substrate processing apparatus based on invariant relationships in regard to a plurality of processing information pieces representing operations or states relating to a process for a substrate by the substrate processing apparatus and a plurality of actually collected processing information pieces, comprising:

• a dummy information generator that generates dummy information by replacing at least part of the plurality of processing information pieces collected from the substrate processing apparatus with a dummy data piece and provides the dummy information to the information analysis device;
• and
• a determiner that determines whether a detecting operation of the information analysis device is proper by determining whether the invariant relationships set in the information analysis device are adapted to the substrate processing apparatus based on whether, in a case in which the dummy information is provided to the information analysis device by the dummy information generator, an abnormality in the substrate processing apparatus has been detected by the information analysis device, wherein
• the dummy data piece is set such that an abnormality in the substrate processing apparatus is detected by the information analysis device when, in a case in which the invariant relationships set in the information analysis device are adapted to the substrate processing apparatus, the dummy information is provided to the information analysis device.