US 2025/0164449 A1Published application

Ultrasonic transducer and method for preparing the same

AssigneeThe Hong Kong Polytechnic University

InventorsJiyan DAI, Guo LI

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Abstract

The present application provides an ultrasonic transducer and a method for preparing the same. The ultrasonic transducer includes a substrate layer, a piezoelectric layer, and an acoustic matching layer laminated in sequence along the thickness direction; the piezoelectric layer includes a substrate, the substrate includes a wiring area and a plurality of piezoelectric array elements distributed in a matrix along the row direction and the column direction, and two adjacent piezoelectric array elements are bonded by an insulating adhesive, and the upper and lower surfaces of the piezoelectric array elements and the insulating adhesive are formed by a vacuum-plated electrode layer to form row and column strip electrodes, which can be formed by cutting and photolithography. The end of the first electrode layer is electrically connected to the first conductive element; the end of the second electrode layer is electrically connected to the second conductive element.

Claims17

Dependent claims

An ultrasonic transducer, comprising:

a substrate layer, a piezoelectric layer, and an acoustic matching layer laminated in sequence along a thickness direction;
wherein the piezoelectric layer comprises a substrate;
the substrate comprises a wiring area and a plurality of piezoelectric array elements distributed at intervals in a matrix along a row direction and a column direction, two adjacent piezoelectric array elements of the plurality of piezoelectric array elements are bonded by an insulating adhesive, and the wiring area is connected to outer sides of the plurality of piezoelectric array elements;
a plurality of first electrode layers distributed at intervals in the row direction are arranged on a side of the substrate adjacent to the substrate layer, each of the plurality of first electrode layers covers a column of the plurality of piezoelectric array elements, a plurality of second electrode layers distributed at intervals in the column direction are arranged on a side of the substrate adjacent to the acoustic matching layer, each of the plurality of second electrode layers covers a row of the plurality of piezoelectric array elements;
and the thickness direction is perpendicular to the row direction and the column direction respectively;
and
wherein at least one end of each of the plurality of first electrode layers in the column direction extends to the wiring area, and is electrically connected to a first conductive element in the wiring area;
at least one end of each of the plurality of second electrode layers in the row direction extends to the wiring area, and is electrically connected to a second conductive element in the wiring area.

5 more elements

A method for preparing an ultrasonic transducer, comprising following steps:

S100:
cutting a substrate into a plurality of piezoelectric array elements distributed in a matrix along a row direction and a column direction, filling a space between two adjacent piezoelectric array elements of the plurality of piezoelectric array elements with an insulating adhesive, and connecting a wiring area on outer sides of the plurality of piezoelectric array elements;
S200:
plating a plurality of first electrode layers and a plurality of second electrode layers on both sides of the substrate along a thickness direction, wherein each of the plurality of first electrode layers covers a column of the plurality of piezoelectric array elements, and each of the plurality of second electrode layers covers a row of the plurality of piezoelectric array elements;
S300:
electrically connecting a first conductive element to at least one end of each of the plurality of first electrode layers extending to the wiring area, and covering each of the plurality of first electrode layers with a substrate layer;
and
S400:
electrically connecting a second conductive element to at least one end of each of the plurality of second electrode layers extending to the wiring area, and covering each of the plurality of second electrode layers with an acoustic matching layer.

6 more elements

Dependencies are inferred from the claim text.