Liquid material vaporization apparatus and operation setting method thereof
AssigneeHORIBA STEC, Co., Ltd.
InventorsHidenori Oba, Hajime Kawakado
Life of this patent
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Abstract
A liquid material vaporization apparatus operates such that, in a gas generation mode, a liquid material is supplied to a tank through a supply path via a first on-off valve set to a predetermined first opening degree, and operates such that, in a purge mode, a purge gas is introduced into the tank through the supply path via the first on-off valve set to a second opening degree that is larger than the first opening degree.
Claims5
A liquid material vaporization apparatus comprising:
- a tank;
- a supply path through which a liquid material is supplied to the tank;
- and
- a first on-off valve that is provided on the supply path,
- the liquid material vaporization apparatus being configured to operate such that, in a gas generation mode, the liquid material is supplied to the tank through the supply path via the first on-off valve set to a predetermined first opening degree,
- the liquid material vaporization apparatus being configured to operate such that, in a purge mode, a purge gas is introduced into the tank through the supply path via the first on-off valve set to a second opening degree that is larger than the first opening degree.
An operation setting method of a liquid material vaporization apparatus including a tank, a supply path through which a liquid material is supplied to the tank, and a first on-off valve that is provided on the supply path, the operation setting method comprising:
- causing the liquid material vaporization apparatus to operate such that, in a gas generation mode, the first on-off valve is set to a predetermined first opening degree, and the liquid material is supplied to the tank through the supply path via the first on-off valve and is vaporized in the tank;
- and
- causing the liquid material vaporization apparatus to operate such that, in a purge mode, the first on-off valve is set to a second opening degree that is larger than the first opening degree, and a purge gas is introduced into the tank via the first on-off valve.
Dependencies are inferred from the claim text.