Immersion cooling system and methods
OwnerWei-Sheng LIN, Chung-Chiu WUinventors
Life of this patent
Estimating the term…
Abstract
A method includes: forming a cooled device by cooling a device in and by a first container of an immersion cooler; performing semiconductor processing by a processing tool in data communication with the cooled device; determining whether the cooled device is in a condition to be removed from the immersion cooler; in response to the cooled device not being in the condition, cooling the device by the immersion cooler; and in response to the cooled device being in the condition, removing the device from the first container, including: positioning a second container over the first container; and with the second container in place covering the first container: opening a lid of the first container; and removing the device from the first container.
Claims20
A method, comprising:
- forming a cooled device by cooling a device in and by a first container of an immersion cooler;
- performing semiconductor processing by a processing tool in data communication with the cooled device;
- determining whether the cooled device is in a condition to be removed from the immersion cooler;
- in response to the cooled device not being in the condition, cooling the device by the immersion cooler;
- and
- in response to the cooled device being in the condition, removing the device from the first container, including:
- positioning a second container over the first container;
- and
- with the second container in place covering the first container:
- opening a lid of the first container;
- and
- removing the device from the first container.
A method comprising:
- covering an immersion cooler by a container;
- with the container in place over the immersion cooler:
- opening a lid of the immersion cooler;
- and
- inserting a device into the immersion cooler;
- cooling the device by the immersion cooler;
- and
- performing semiconductor processing by a processing tool in data communication with the device cooled by the immersion cooler.
A system, comprising:
- an immersion cooler having a tank and a lid that covers the tank;
- a device in the tank of the immersion cooler;
- an enclosure;
- and
- a vehicle having a housing, wherein the vehicle, in operation:
- positions the enclosure over the tank;
- and
- with the enclosure in position over the tank, removes the device from the tank and places the device in the housing.
Dependencies are inferred from the claim text.