Airtight terminal

An airtight terminal comprising:

• a metal substrate in which a plurality of through-holes are formed;
• a plurality of conductive terminals each introduced through the respective through-holes;
• a glass filling material that has an electrical insulating property, fills between the through-hole and the conductive terminal, and seals between the through-hole and the conductive terminal;
• a protective member that is formed of a material with an electrical insulating property and elasticity and covers around the conductive terminal with the conductive terminal introduced in the protective member;
• and
• a locking portion that is provided in the conductive terminal or the glass filling material,
• wherein the protective member includes
• a holding portion that is provided in the protective member on a side opposite to a side of the metal substrate, is formed to have a smaller inner diameter than an outer diameter of the conductive terminal, and holds the conductive terminal,
• a deformable portion that is provided on the side of the metal substrate with respect to the holding portion and is elastically deformable in a direction in which the deformable portion is compressed in contact with any one or both of the metal substrate and the glass filling material in a case in which the protective member is attached to the conductive terminal, and
• a restricting portion that comes into contact with the locking portion and restricts movement of the protective member on the side of the metal substrate in the case in which the protective member is attached to the conductive terminal.