# US 2025/0157785 A1 · Charged particle beam device adjustment method and charged particle beam device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0157785 A1 - Document ID: US20250157785A1 - Status: Published application - Kind: A1 - Application number: 18/839,987 - Filed: 2023-02-03 - Published: 2025-05-15 - Earliest claimed: 2022-03-28 - Assignees: Hitachi High-Tech Corporation - Applicants: Hitachi High-Tech Corporation - Inventors: Hidenori MACHIYA; Yoshifumi SEKIGUCHI; Naoya NAKAI - Web page: https://patentgrep.com/patent/US20250157785A1 ## CPC - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - H01J 37/22: Optical {, image processing} or photographic arrangements associated with the tube - H01J 37/222: {Image processing arrangements associated with the tube} - H01J 37/226: {Optical arrangements for illuminating the object; optical arrangements for collecting light from the object} - H01J 37/228: {whereby illumination or light collection take place in the same area of the discharge} - H01J 37/244: Detectors; Associated components or circuits therefor - H01J 37/265: {Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination} - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - H01J 2237/20292: Means for position and/or orientation registration - H01J 2237/24578: Spatial variables, e.g. position, distance - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A light irradiation positioning adjustment method adjusts an irradiation position of first light in a charged particle beam device that irradiates a sample. A particle beam detector detects the particle beam from the sample and generates a signal. A photodetector detects second light emitted from the sample due to the irradiation using the first light and generates a photoelectric signal. An adjustment sample placed on a sample stage with a reference structure is irradiated with the first light and the second light generated by the first light being modulated by the reference structure is detected to generate a photoelectric signal. A command is issued to change the irradiation position of the first light so as to pass through the reference structure based on a change in the photoelectric signal such that an irradiation position of the charged particle beam and the irradiation position of the first light match. ## Claims ### Claim 1 A light irradiation position adjustment method for adjusting an irradiation position of first light in a charged particle beam device, the charged particle beam device including: a particle beam source configured to irradiate a sample with a charged particle beam; a particle beam detector configured to detect a particle beam from the sample and generate a particle beam electric signal; a light source configured to generate the first light with which the sample is irradiated; a movable mechanism configured to move the irradiation position of the first light; a photodetector configured to detect second light emitted from the sample due to the irradiation using the first light and generate a photoelectric signal; a sample stage having a configuration allowing the sample to be placed and moved thereon; and a control device, the method comprising: the light source irradiating, with the first light, an adjustment sample placed on the sample stage and including a reference structure; the photodetector detecting the second light, that is generated by the first light being modulated by the reference structure, and sending the photoelectric signal to the control device; and the control device issuing a command to change the irradiation position of the first light so as to pass through the reference structure, and performing an adjustment, based on a change in the photoelectric signal, the movable mechanism such that an irradiation position of the charged particle beam and the irradiation position of the first light match. ### Claim 2 (depends on 1) The adjustment method according to claim 1, wherein the reference structure has a periodic structure, and when a wavelength of the first light is set as λ and a refractive index of a medium on which the first light is incident is set as n, a period of the periodic structure is λ/n or more and is smaller than an irradiation diameter of the first light. ### Claim 3 (depends on 1) The adjustment method according to claim 1, wherein the reference structure is made of a material that emits fluorescence in response to the first light. ### Claim 4 (depends on 1) The adjustment method according to claim 1, wherein the reference structure is made of a material or implemented by a structure which generates scattered light in response to the first light. ### Claim 5 (depends on 1) The adjustment method according to claim 1, wherein the reference structure is implemented by a mirror surface adjusted to an inclination at which reflection light is emitted in a direction of the photodetector. ### Claim 6 (depends on 1) The adjustment method according to claim 1, wherein the irradiation position of the first light is two-dimensionally adjustable. ### Claim 7 (depends on 1) The adjustment method according to claim 1, wherein the particle beam detector has a function of detecting light. ### Claim 8 (depends on 1) The adjustment method according to claim 1, wherein the adjustment sample includes a plurality of structures, and a distance between adjacent two of the plurality of structures is larger than an irradiation position movable range. ### Claim 9 (depends on 1) The adjustment method according to claim 1, wherein the adjustment sample has structures of different sizes, and the adjustment of the movable mechanism is performed in descending order of the sizes of the structures. ### Claim 10 (depends on 1) The adjustment method according to claim 1, wherein the charged particle beam device further includes a height sensor configured to measure a height of the sample, the adjustment sample has portions of different heights, and the irradiation position of the first light on the sample at the heights is calibrated by adjusting the movable mechanism. ### Claim 11 (depends on 2) The adjustment method according to claim 2, wherein the periodic structure is two-dimensional. ### Claim 12 (depends on 1) The adjustment method according to claim 1, wherein the adjustment of the movable mechanism is performed such that intensity of the second light detected by the photodetector is maximum. ### Claim 13 (depends on 1) The adjustment method according to claim 1, wherein the second light includes reflection light and secondary light, and the adjustment of the movable mechanism is performed by using an electric signal derived from the reflection light and the secondary light. ### Claim 14 (depends on 1) The adjustment method according to claim 1, wherein the adjustment sample includes a marker for detecting a center by an image obtained by emitting the charged particle beam, the center of the reference structure of the adjustment sample is disposed at a position deviated from a center of the marker, and the adjustment of the movable mechanism is performed by using the reference structure. ### Claim 15 (depends on 1) The adjustment method according to claim 1, wherein the first light is emitted to the sample from a direction different from the charged particle beam. ### Claim 16 A charged particle beam device, comprising: a particle beam source configured to irradiate a sample with a charged particle beam; a particle beam detector configured to detect a particle beam from the sample and generate a particle beam electric signal; a light source configured to generate first light with which the sample is irradiated; a movable mechanism configured to move an irradiation position of the first light; a photodetector configured to detect second light emitted from the sample due to the irradiation using the first light and generate a photoelectric signal; a sample stage having a configuration allowing the sample to be placed and moved thereon; and a control device, wherein the light source irradiates, with the first light, an adjustment sample placed on the sample stage and including a reference structure, the photodetector detects the second light, that is generated by the first light being modulated by the reference structure, and sends the photoelectric signal to the control device, and the control device issues a command to change the irradiation position of the first light so as to pass through the reference structure, and performs an adjustment, based on a change in the photoelectric signal, the movable mechanism such that an irradiation position of the charged particle beam and the irradiation position of the first light match. ### Claim 17 (depends on 16) The charged particle beam device according to claim 16, wherein the first light is configured to be emitted to the sample from a direction different from the charged particle beam. ### Claim 18 (depends on 16) The charged particle beam device according to claim 16, wherein the irradiation position of the first light is two-dimensionally adjustable. ### Claim 19 (depends on 16) The charged particle beam device according to claim 16, wherein the particle beam detector has a function of detecting light. ### Claim 20 (depends on 16) The charged particle beam device according to claim 16, further comprising: a height sensor configured to measure a height of the sample, wherein the adjustment sample has portions of different heights, and the irradiation position of the first light on the sample at the heights is calibrated by adjusting the movable mechanism. ### Claim 21 (depends on 16) The charged particle beam device according to claim 16, wherein the adjustment of the movable mechanism is performed such that intensity of the second light detected by the photodetector is maximum. ### Claim 22 (depends on 16) The charged particle beam device according to claim 16, wherein the second light includes reflection light and secondary light, and the adjustment of the movable mechanism is performed by using an electric signal derived from the reflection light and the secondary light. ### Claim 23 (depends on 1) The adjustment method according to claim 1, wherein the control device moves the irradiation position of the first light so as to pass through a boundary line of the reference structure. ### Claim 24 (depends on 23) The adjustment method according to claim 23, wherein the reference structure has a linear boundary line, and the linear boundary line is perpendicular to a direction in which the irradiation position of the first light is moved by the movable mechanism. ### Claim 25 (depends on 23) The adjustment method according to claim 23, wherein the reference structure has a plurality of non-parallel boundary lines. ### Claim 26 (depends on 1) The adjustment method according to claim 1, wherein when a maximum value of a signal amount when the irradiation position of the first light passes through a boundary line of the reference structure is set as M and a minimum value of the signal amount is set as m, the control device adjusts the movable mechanism to a position where the signal amount is (M+m)/2. ### Claim 27 (depends on 1) The adjustment method according to claim 1, wherein the control device adjusts the movable mechanism to a position where a change rate of a signal amount when the irradiation position of the first light passes through a boundary line of the reference structure is maximum. ### Claim 28 (depends on 16) The charged particle beam device according to claim 16, wherein the control device moves the irradiation position of the first light so as to pass through a boundary line of the reference structure. ### Claim 29 (depends on 16) The charged particle beam device according to claim 16, wherein when a maximum value of a signal amount when the irradiation position of the first light passes through a boundary line of the reference structure is set as M and a minimum value of the signal amount is set as m, the control device adjusts the movable mechanism to a position where the signal amount is (M+m)/2. ### Claim 30 (depends on 16) The charged particle beam device according to claim 16, wherein the control device adjusts the movable mechanism to a position where a change rate of a signal amount when the irradiation position of the first light passes through a boundary line of the reference structure is maximum.