US 2025/0157779 A1 · MINIMIZATION OF ENERGY SPREAD IN FOCUSED ION BEAM (FIB) SYSTEMS

Abstract

Charged-particle beam (CPB) optical systems can include a beam acceptance aperture plate defining a first acceptance aperture and at least one second acceptance aperture, situated with respect to a CPB source so that a first CPB is transmitted by the first acceptance aperture and a second CPB is transmitted by a second acceptance aperture. A CPB lens is situated to receive the first and second CPBs from the beam acceptance aperture plate and direct the first and second CPBs towards a filter aperture plate to transmit selected spectral portion of the second CPB. The selected spectral component of the first CPB can be selectively directed to a workpiece by a beam steering deflector along the same axis. In some examples, the first and second CPBs have different beam currents and only one is directed to a workpiece.

Claims23

Dependent claims

A charged-particle beam (CPB) optical system, comprising:

a beam acceptance aperture plate defining a first acceptance aperture and at least one second acceptance aperture and situated with respect to a CPB source so that a first CPB is transmitted by the first acceptance aperture and a second CPB is transmitted by the at least one second acceptance aperture;
a blanking aperture plate defining a blanking aperture;
and
a beam selector operable to selectively direct the first CPB or the second CPB to a workpiece through the blanking aperture.

1 more element

Dependencies are inferred from the claim text.

Minimization of energy spread in focused ion beam (fib) systems

Life of this patent

Minimization of energy spread in focused ion beam (fib) systems

Life of this patent

Abstract

Claims23