# US 2025/0157746 A1 · Electrode of energy storage element and manufacturing method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0157746 A1 - Document ID: US20250157746A1 - Status: Published application - Kind: A1 - Application number: 18/404,833 - Filed: 2024-01-04 - Published: 2025-05-15 - Earliest claimed: 2023-11-14 - Assignees: Industrial Technology Research Institute - Applicants: Industrial Technology Research Institute - Inventors: Hung-Hsin Shih; Kun-Ping Huang; Chi-Chang Hu; Da-Je Hsu; Chen-Wei Tai - Web page: https://patentgrep.com/patent/US20250157746A1 ## CPC - H01G 11/86: specially adapted for electrodes (carbonisation or activation of carbon for the manufacture of electrodes H01G11/34) - C01B 32/186: by chemical vapour deposition [CVD] - C01B 32/194: After-treatment - C23C 16/26: Deposition of carbon only - C23C 16/511: using microwave discharges - C23C 16/56: After-treatment - H01G 11/32: Carbon-based - H01G 11/36: Nanostructures, e.g. nanofibres, nanotubes or fullerenes - C01B 2204/04: Specific amount of layers or specific thickness - C01B 2204/22: Electronic properties - C01P 2002/82: by IR- or Raman-data - C01P 2002/85: by XPS, EDX or EDAX data - C01P 2004/03: obtained by SEM - C01P 2006/40: Electric properties - H01M 4/587: for inserting or intercalating light metals - Y02E 60/10: Energy storage using batteries - H01G: CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE (selection of specified materials as dielectric H01B3/00; capacitors having potential barriers H10D1/62, H10K10/10) - C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - C01P: INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS - H01M: PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION ## Abstract A manufacturing method of an electrode of an energy storage element includes: providing a substrate into microwave plasma equipment; introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment; forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls. A volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1. An electrode of an energy storage element is also provided. ## Claims ### Claim 1 A manufacturing method of an electrode of an energy storage element, comprising: providing a substrate into microwave plasma equipment; introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment; forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls, wherein a volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1. ### Claim 2 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the number of cycles of performing the electrochemical activation treatment is one or more. ### Claim 3 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the carbon precursor gas comprises a hydrocarbon gas. ### Claim 4 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the microwave plasma chemical vapor deposition comprises electron cyclotron resonance chemical vapor deposition (ECR-CVD), multi electron cyclotron resonance chemical vapor deposition (MECR-CVD), microwave plasma torch chemical vapor deposition (MPT-CVD), focused plasma chemical vapor deposition (FMP-CVD), or a combination thereof. ### Claim 5 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein a microwave frequency used in the microwave plasma chemical vapor deposition is greater than or equal to 300 MHz and less than or equal to 300 GHz. ### Claim 6 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein microwave output power used in the microwave plasma chemical vapor deposition is greater than 400 W and less than 75 KW. ### Claim 7 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the volume ratio of the carrier gas to the carbon precursor gas is 1:2 to 2:1. ### Claim 8 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the number of layers of the multi-layer graphene walls is greater than or equal to 2 and less than or equal to 10. ### Claim 9 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the number of layers of the multi-layer graphene walls is greater than 10 and less than or equal to 20. ### Claim 10 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein a material of the substrate comprises a metal material, wherein the metal material is selected from copper, gold, silver, titanium, nickel, tin, platinum, palladium, aluminum, or a combination of the foregoing. ### Claim 11 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein a material of the substrate comprises a conductive polymer material, wherein the conductive polymer material is selected from polyaniline, polyacetylene, polyparastyrene, polyparaphenylene, polypyrrole, polythiophene, or a combination of the foregoing. ### Claim 12 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the electrolyte solution comprises LiPF6, LiBF4, TEABF4, LiFSI, LiTFSI, or a combination of the foregoing. ### Claim 13 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the performing the electrochemical activation treatment comprises performing a constant current method, cyclic voltammetry, or a combination of the foregoing. ### Claim 14 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein an operating potential range in the electrochemical activation treatment is greater than or equal to 0V and less than or equal to 6V, or greater than or equal to −6V and less than or equal to 0V. ### Claim 15 (depends on 1) The manufacturing method of the electrode of the energy storage element according to claim 1, wherein the carrier gas comprises argon or nitrogen. ### Claim 16 (depends on 1) An electrode of an energy storage element formed by using the manufacturing method of the electrode of the energy storage element according to claim 1, the electrode of the energy storage element comprising: the substrate; and the graphene arranged on the substrate and comprising the multi-layer graphene walls. ### Claim 17 (depends on 16) The electrode of the energy storage element according to claim 16, wherein the number of layers of the multi-layer graphene walls is greater than or equal to 2 and less than or equal to 10. ### Claim 18 (depends on 16) The electrode of the energy storage element according to claim 16, wherein the number of layers of the multi-layer graphene walls is greater than 10 and less than or equal to 20. ### Claim 19 (depends on 16) The electrode of the energy storage element according to claim 16, wherein a material of the substrate comprises a metal material, wherein the metal material is selected from copper, gold, silver, titanium, nickel, tin, platinum, palladium, aluminum, or a combination of the foregoing. ### Claim 20 (depends on 16) The electrode of the energy storage element according to claim 16, wherein a material of the substrate comprises a conductive polymer material, wherein the conductive polymer material is selected from polyaniline, polyacetylene, polyparastyrene, polyparaphenylene, polypyrrole, polythiophene, or a combination of the foregoing. ### Claim 21 (depends on 16) The electrode of the energy storage element according to claim 16, wherein the graphene is doped with nitrogen, silicon, or sulfur.