A Machine-Readable Marker and Identification Method
AssigneeCambridge Enterprise Limited
InventorsTeja Potocnik, Peter J. Christopher, Ralf Mouthaan, Jack A. Alexander-Webber
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Abstract
Broadly speaking, embodiments of the present techniques provide an optically- or machine-readable fiducial marker for use in nanoscale applications and a method for automatic detection of a marker. Advantageously, the fiducial marker of the present techniques has features which make it resistant to the processing steps of electron beam lithography. Furthermore, the fiducial marker is robust when reproduced at nanoscales and has high information density.
Claims21
1-36. (canceled)
A machine-readable fiducial marker comprising:
- a spine comprising a minor axis and a major axis, wherein orientation of the major and minor axes defines an orientation of the marker on a substrate, and wherein the spine defines:
- a shape of the marker, the shape having a perimeter to area ratio within a pre-defined threshold range, and
- at least two areas of the marker;
- and
- at least one set of symbols provided in one or more of the at least two areas, the at least one set of symbols encoding co-ordinate information of a position relative to a centroid of the spine on a substrate.
A method for identifying a machine-readable fiducial marker on a substrate, the fiducial marker comprising:
- a spine comprising a minor axis and a major axis, wherein orientation of the major and minor axes defines an orientation of the marker on a substrate, and wherein the spine defines:
- a shape of the marker, the shape having a perimeter to area ratio within a pre-defined threshold range, and
- at least two areas of the marker;
- and
- at least one set of symbols provided in one or more of the at least two areas, the at least one set of symbols encoding co-ordinate information of a position relative to a centroid of the spine on a substrate,
- the method comprising:
- obtaining an image of a substrate on which the machine-readable fiducial marker is formed;
- obtaining information on properties of the fiducial marker formed on the substrate;
- and
- using the obtained information to identify a fiducial marker in the image.
A method for controlling a machine during a machine calibration or manufacturing process using an array of machine-readable fiducial markers on a substrate, wherein each fiducial marker comprises:
- a spine comprising a minor axis and a major axis, wherein orientation of the major and minor axes defines an orientation of the marker on a substrate, and wherein the spine defines:
- a shape of the marker, the shape having a perimeter to area ratio within a pre-defined threshold range, and
- at least two areas of the marker;
- and
- at least one set of symbols provided in one or more of the at least two areas, the at least one set of symbols encoding co-ordinate information of a position relative to a centroid of the spine on a substrate,
- the method comprising:
- capturing at least one image of the array of machine-readable fiducial markers;
- identifying at least one machine-readable fiducial marker in the array by:
- obtaining information on properties of the fiducial marker formed on the substrate;
- and
- using the obtained information to identify a fiducial marker in the image;
- and
- controlling the machine using the identified at least one fiducial marker.
Dependencies are inferred from the claim text.