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AssigneeApplied Materials, Inc.
InventorsPrashanth Kothnur, Ala Moradian, Umesh Madhav Kelkar, Phillip Stout, Badri Ramamurthi, Karthik Ramanathan, Ananth Bhoj, Dalong Zhao
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In one aspect of the present disclosure, a method includes obtaining, by a processing device, input data indicative of a first set of process parameters. The method further includes providing the input data to a first process model. The method further includes obtaining, from the first process model, first predictive output indicative of performance of a first process operation in accordance with the first set of process parameters. The method further includes providing the first predictive output to a second process model. The method further includes obtaining, from the second process model, second predictive output indicative of performance of a second process operation, different than the first process operation or a repetition of the first process operation, in accordance with the first set of process parameters. The method further includes performing a corrective action in view of the second predictive output.
A method comprising:
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Dependencies are inferred from the claim text.