Waveguide with multiple sets of layers
AssigneeViavi Solutions Inc.
InventorsWilliam D. HOUCK, Georg J. OCKENFUSS
Life of this patent
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Abstract
A waveguide includes a plurality of sets of layers arranged in a stack. Each set of layers includes a first layer that comprises at least tantalum and oxygen, and a second layer that comprises at least silicon and oxygen. The waveguide is configured to propagate light associated with a particular wavelength in a first direction that is orthogonal to a second direction in which the plurality of sets of layers are arranged in the stack. A quantity of the plurality of sets of layers is greater than or equal to 15. Respective thicknesses of the first layer and the second layer, in the second direction, are less than or equal to a fifteenth of the particular wavelength.
Claims20
A waveguide, comprising:
- a substrate;
- and
- a plurality of sets of layers disposed on the substrate in a stack, wherein each set of layers includes:
- a first layer that comprises at least tantalum and oxygen;
- and
- a second layer that comprises at least silicon and oxygen, wherein:
- the waveguide is configured to propagate light associated with a particular wavelength in a first direction that is orthogonal to a second direction in which the plurality of sets of layers are disposed on the substrate in the stack, and
- respective thicknesses of the first layer and the second layer, in the second direction, are less than or equal to a fifteenth of the particular wavelength.
A waveguide, comprising:
- a plurality of sets of layers arranged in a stack, wherein each set of layers includes:
- a first layer that comprises at least tantalum and oxygen;
- and
- a second layer that comprises at least silicon and oxygen, wherein:
- the waveguide is configured to propagate light associated with a particular wavelength in a first direction that is orthogonal to a second direction in which the plurality of sets of layers are arranged in the stack, and
- a quantity of the plurality of sets of layers is greater than or equal to 15.
A waveguide, comprising:
- a plurality of sets of layers arranged in a stack, wherein each set of layers includes:
- a first layer that comprises at least a first material;
- and
- a second layer that comprises at least a second material, wherein:
- the waveguide is configured to propagate light associated with a particular wavelength in a first direction that is orthogonal to a second direction in which the plurality of sets of layers are arranged in the stack, and
- a quantity of the plurality of sets of layers is greater than or equal to 15.
Dependencies are inferred from the claim text.