Substrate modification region measurement apparatus and method

A spectrum detection apparatus, at least comprising:

• a light source controller, a light emitting apparatus, a light detector and a computer;
• wherein the light source controller is electrically connected to the light emitting apparatus, the light detector is electrically connected to the computer, a mathematical analysis module is installed in the light detector or the computer, the light detector receives a light beam emitted by the light emitting apparatus, and a propagation path of the light beam between the light emitting apparatus and the light detector forms a light path;
• wherein the light emitting apparatus at least comprises a plurality of light emitting units, wherein the light emitting units emit light with different light emission peak wavelengths and different wavelength ranges, and each of the light emitting units is controlled to discontinuously emit the light with a lighting frequency;
• wherein the light emitting units respectively are provided with current densities, so that the light emitted by each of the light emitting unit has a light intensity, and all of the current densities provided to the light emitting units are different from each other or identical to each other, or at least two of the current densities provided to the light emitting units are different from each other or identical to each other,
• wherein an initial spectrum energy distribution curve of each of the light emitting units is measured and obtained by using the light detector and the computer;
• wherein the light source controller selects the lighting emitting unit corresponding to the light intensity of a specific value among the light intensities, and increases or decreases the current density corresponding to the non-selected light emitting unit, so as to make the light intensity corresponding to the non-selected light emitting unit similar or approximate to the light intensity corresponding to the selected light emitting unit, so that signal to noise ratios (SNRs) of the wavelength ranges corresponding to the non-selected light emitting units are increased, and SNRs of the wavelength ranges corresponding to all of the light emitting units are similar to each other;
• wherein during a light emitting unit turned-on time interval of the lighting frequency, a received signal of light detector is a composite signal of a background noise and the spectrum signal of an object under test, and during a light emitting unit turned-off time interval of the lighting frequency, the received signal of light detector is the background noise, wherein the spectrum signal of the object under test and the background noise forms a time-domain signal of the object under test;
• and
• wherein the object under test is disposed on the light path, and the light emitting apparatus and the object under test are capable of rotating relative to each other.