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US 2025/0155273 A1Published application
Weighing device for a semiconductor wafer
AssigneeMetryx Limited
InventorsGregor Robert ELLIOTT, Robert John WILBY, Huw DUTTON
Life of this patent
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Abstract
An apparatus comprising: a measurement chamber, wherein the measurement chamber has a removable lid; and a plurality of wafer support elements for supporting a wafer from beneath, wherein the plurality of wafer support elements are provided on the lid.
Claims41
An apparatus comprising:
- a measurement chamber, wherein the measurement chamber has a removable lid;
- and
- a plurality of wafer support elements for supporting a wafer from beneath, wherein the plurality of wafer support elements are provided on the lid.
Dependencies are inferred from the claim text.