Method and device for coating powder- or granular-form particles
OwnerRainer Cremerinventor
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Abstract
The invention relates to a method and a device for coating powder- or granular-form particles by means of gas flow sputtering with a hollow cathode functioning as a target, which is arranged in an evacuable container together with an anode and a collection container. In order to work efficiently and with easier handling, it is proposed that after a metered introduction into an inlet opening, the powder- or granular-form particles to be coated pass through the evacuated interior of the hollow cathode in a free fall of 0.3 m to 1 m and are collected in a lower collection container.
Claims20
A method for coating powder- or granular-form particles by means of gas flow sputtering with a hollow cathode functioning as a target, wherein
- the powder- or granular-form particles to be coated, after a metered introduction into an inlet opening pass through the evacuated interior of the hollow cathode in free fall of 0.3 m to 1 m and are collected in a lower collection container.
A device for coating powder- or granular-form particles by means of gas flow sputtering with an evacuable container in which a hollow cathode functioning as a target and an anode as well as collection containers are arranged,
- wherein
- the container has an inlet opening in the upper area for powder- or granular-form particles and for a gas or a gas mixture, which opens into the hollow cathode with a vertical length of 0.3 m to 1 m, below which the collection containers for the coated particles are arranged.
Dependencies are inferred from the claim text.