Information processing apparatus, inference apparatus, machine-learning apparatus, information processing method, inference method, and machine-learning method

An inference apparatus comprising:

• a memory;
• and
• a processor,
• the processor being configured to perform:
• an information acquisition process of acquiring polishing condition information including top-ring vibration information indicating vibration of a top ring in chemical mechanical polishing of the substrate and top-ring sound information indicating sound generated from the top ring or a polishing table in the chemical mechanical polishing of the substrate performed by a substrate processing apparatus including the polishing table rotatably supporting the polishing pad and the top ring configured to press the substrate against the polishing pad;
• and
• an inference process of inferring substrate slip-out information indicating occurrence of slip out of the substrate on which the chemical mechanical polishing is performed under conditions indicated by the polishing condition information when the polishing condition information is acquired in the information acquisition process.

A machine-learning apparatus comprising:

• a learning-data storage section storing multiple sets of learning data including polishing condition information and substrate slip-out information, the polishing condition information including top-ring vibration information indicating vibration of a top ring in chemical mechanical polishing of the substrate and top-ring sound information indicating sound generated from the top ring in the chemical mechanical polishing of the substrate performed by a substrate processing apparatus including a polishing table rotatably supporting the polishing pad and the top ring configured to press the substrate against the polishing pad, the substrate slip-out information indicating occurrence of slip out of the substrate on which the chemical mechanical polishing is performed;
• a machine-learning section configured to cause a learning model to learn a correlation between the polishing condition information and the substrate slip-out information by inputting the multiple sets of learning data to the learning model;
• and
• a learned-model storage section configured to store the learning model that has learned the correlation by the machine-learning section.

A machine-learning method comprising:

• a learning-data storage process of storing multiple sets of learning data including polishing condition information and substrate slip-out information, the polishing condition information including top-ring vibration information indicating vibration of a top ring in chemical mechanical polishing of the substrate and top-ring sound information indicating sound generated from the top ring in the chemical mechanical polishing of the substrate performed by a substrate processing apparatus including a polishing table rotatably supporting the polishing pad and the top ring configured to press the substrate against the polishing pad, the substrate slip-out information indicating occurrence of slip out of the substrate on which the chemical mechanical polishing is performed;
• a machine-learning process of causing a learning model to learn a correlation between the polishing condition information and the substrate slip-out information by inputting the multiple sets of learning data to the learning model;
• and
• a learned-model storage process of storing the learning model that has learned the correlation by the machine-learning section.