Surface treatment apparatus
AssigneeShibaura Machine Co., Ltd.
InventorsTakeshi NAMBA, Kazuhiro FUKADA, Yoshiaki KURIHARA
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Abstract
A surface treatment apparatus includes a treatment electrode, a housing unit that is installed at a position facing the treatment electrode and is rotatable around a rotation shaft having an inclination with respect to a horizontal direction while housing a workpiece, a chamber that houses the treatment electrode and the housing unit, a surface treatment device that performs surface treatment on the workpiece housed in the housing unit and includes the treatment electrode, and a rotation device that rotates the housing unit around the rotation shaft when the surface treatment device performs the surface treatment on the workpiece.
Claims13
A surface treatment apparatus comprising:
- a treatment electrode;
- a housing unit that is installed at a position facing the treatment electrode and is rotatable around a rotation shaft having an inclination with respect to a horizontal direction while housing a workpiece;
- a chamber that houses the treatment electrode and the housing unit;
- a surface treatment device that performs surface treatment on the workpiece housed in the housing unit, and includes the treatment electrode;
- and
- a rotation device that rotates the housing unit around the rotation shaft when the surface treatment device performs the surface treatment on the workpiece.
Dependencies are inferred from the claim text.