High-power thin film resistor and method of manufacturing thereof

A high-power thin film resistor, comprising:

• a substrate;
• a resistance layer disposed on the substrate, wherein the resistance layer includes a middle resistance area and two terminal resistance areas;
• an internal electrode layer disposed on the resistance layer, wherein the internal electrode layer includes a middle internal electrode area and two terminal internal electrode areas, the middle internal electrode area and the two terminal internal electrode areas divide the resistance layer into the middle resistance area and the two terminal resistance areas;
• a passivation layer covering portions of the resistance layer and the internal electrode layer;
• and
• a thermal conductive layer disposed on the passivation layer, wherein the thermal conductive layer includes two thermal conductors and a gap between the two thermal conductors, and the two thermal conductors contact the two terminal internal electrode areas of the internal electrode layer respectively;
• wherein the middle resistance area and the two terminal resistance areas form a series resistance, and the two terminal resistance areas have the same resistance value.