# US 2025/0146971 A1 · Graphene sensors and a method of manufacture

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- Number: US 2025/0146971 A1
- Document ID: US20250146971A1
- Status: Published application
- Kind: A1
- Application number: 18/730,072
- Filed: 2023-01-31
- Published: 2025-05-08
- Earliest claimed: 2022-02-04
- Assignees: Paragraf Limited
- Applicants: Paragraf Limited
- Inventors: Liam McDonnell; Robert Wallis
- Web page: https://patentgrep.com/patent/US20250146971A1

## CPC

- G01N 27/4145: {specially adapted for biomolecules, e.g. gate electrode with immobilised receptors}
- G01N 27/4141: {specially adapted for gases}
- G01N 27/4146: {involving nanosized elements, e.g. nanotubes, nanowires}
- H10P 14/24: using chemical vapour deposition [CVD]
- H10P 14/3406: {Carbon, e.g. diamond-like carbon}
- H10P 14/6938: {the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides}
- H10P 50/00: Etching of wafers, substrates or parts of devices
- H10P 50/242: {of Group IV materials}
- H10P 50/285: {of materials not containing Si, e.g. PZT or Al2O3}
- H10P 50/691: {for Group IV materials or Group III-V materials}
- H10P 50/73: {using masks for insulating materials}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

There is provided a graphene sensor, preferably a graphene biosensor, comprising: a graphene layer structure provided on a non-metallic surface of a substrate, the graphene layer structure having an exposed, functionalised sample surface for receiving a sample for testing; first and second electrical contacts provided in contact with the graphene layer structure, and arranged on opposite sides of the functionalised sample surface; wherein each electrical contact is separated from the functionalised sample surface by an adjacent metal oxide layer, and wherein each electrical contact and adjacent metal oxide layer are capped with a passivating layer, whereby a sample for testing applied to the sample surface cannot contact the electrical contacts; and wherein the functionalised sample surface is devoid of photoresist.

## Claims

### Claim at position 1

-2. (canceled)

### Claim 3

A graphene sensor comprising:
a graphene layer structure provided on a non-metallic surface of a substrate, the graphene layer structure having an exposed sample surface for receiving a sample for testing;
first and second electrical contacts provided in contact with the graphene layer structure, and arranged on opposite sides of the sample surface;
wherein each electrical contact is separated from the sample surface by an adjacent metal oxide layer, and wherein each electrical contact and adjacent metal oxide layer are capped with a passivating layer; and
wherein the sample surface is devoid of photoresist.

### Claim 4 (depends on 3)

The graphene sensor according to claim 3, wherein the metal oxide layer is aluminium oxide.

### Claim 5 (depends on 3)

The graphene sensor according to claim 3, wherein the graphene layer structure is a graphene monolayer.

### Claim 6 (depends on 3)

The graphene sensor according to claim 3, wherein the passivating layer comprises aluminium oxide, silicon oxide, silicon nitride, photoresist and/or synthetic resin.

### Claim 7 (depends on 3)

The graphene sensor according to claim 3, wherein the thickness of the metal oxide layer is from 2 nm to 5 μm.

### Claim 8 (depends on 3)

The graphene sensor according to claim 3, wherein the width of the metal oxide layer is at least 0.5 μm.

### Claim 9 (depends on 3)

The graphene sensor according to claim 3, wherein the thickness of the passivation layer is at least 5 nm.

### Claim 10

A container for storage and shipping, containing a plurality of precursors for the manufacture of a graphene sensor, wherein each precursor comprises:
a graphene layer structure provided on a non-metallic surface of a substrate, wherein the graphene layer structure is formed on the non-metallic surface of the substrate by CVD;
first and second electrical contacts in contact with the graphene layer structure, and arranged on opposite sides of the precursor;
a metal oxide layer on and across the graphene layer structure, in contact with and between the first and second electrical contacts; and
a passivating layer provided on the metal oxide layer and on and across the first and second electrical contacts, defining an uncoated window of exposed metal oxide layer, the window arranged between the first and second electrical contacts.

### Claim 11

A method for the manufacture of a graphene sensor, the method comprising:
(i) providing a precursor comprising:
a graphene layer structure on a non-metallic surface of a substrate, wherein the graphene layer structure is formed on the non-metallic surface of the substrate by CVD;
first and second electrical contacts in contact with the graphene layer structure, and arranged on opposite sides of the precursor;
a metal oxide layer on and across the graphene layer structure, in contact with and between the first and second electrical contacts; and
a passivating layer provided on the metal oxide layer and on and across the first and second electrical contacts, defining an uncoated window of exposed metal oxide layer, the window arranged between the first and second electrical contacts;
(ii) etching the uncoated window of exposed metal oxide layer to form a graphene sensor having an exposed sample surface of the graphene layer structure for receiving a sample for testing; and optionally
(iii) functionalising the exposed sample surface to form a graphene sensor having a functionalised sample surface for receiving a sample for testing.

### Claim 12 (depends on 1, 11)

The method according to claim 11, wherein the graphene sensor is in accordance with claim 1.

### Claim 13 (depends on 11)

The method according to claim 11, wherein the precursor is obtained in a method comprising:
(i) providing a substrate having a non-metallic surface;
(ii) forming a graphene layer structure on the non-metallic surface by CVD;
(iii) forming a metal oxide layer on and across the graphene layer structure;
(iv) applying a first photoresist to the metal oxide layer and patterning it to provide a first masked region;
(v) etching the metal oxide layer to retain only the metal oxide layer beneath the first masked region, exposing a portion of the graphene layer structure;
(vi) plasma etching the exposed portion of the graphene layer structure to retain only the graphene layer structure beneath the first masked region;
(vii) removing the first photoresist;
(viii) applying a second photoresist to the metal oxide layer and patterning it to provide a second masked region;
(ix) etching the metal oxide layer to retain only the metal oxide layer beneath the second masked region, exposing a portion of the graphene layer structure;
(x) depositing metal to form first and second electrical contacts, each in contact with the exposed graphene layer structure and an edge of the metal oxide layer; and
(xi) removing the second photoresist.

### Claim 14 (depends on 11)

The method according to claim 11, wherein the precursor is obtained in a method comprising:
(i) providing a substrate having a non-metallic surface;
(ii) forming a graphene layer structure on the non-metallic surface by CVD;
(iii) forming a patterned metal oxide layer on the graphene layer structure;
(vi) plasma etching the graphene layer structure to retain only the graphene layer structure beneath the patterned metal oxide layer;
(viii) applying a second photoresist to the metal oxide layer and patterning it to provide a second masked region;
(ix) etching the metal oxide layer to retain only the metal oxide layer beneath the second masked region, exposing a portion of the graphene layer structure;
(x) depositing metal to form first and second electrical contacts, each in contact with the exposed graphene layer structure and an edge of the metal oxide layer; and
(xi) removing the second photoresist.

### Claim 15 (depends on 11)

The method according to claim 11, wherein the precursor is obtained in a method comprising:
(I) providing a substrate having a non-metallic surface;
(II) forming a graphene layer structure on the non-metallic surface by CVD;
(III) forming a metal oxide layer on and across the graphene layer structure;
(IV) applying a first photoresist to the metal oxide layer and patterning it to provide a first masked region;
(V) etching the metal oxide layer to retain only the metal oxide layer beneath the first masked region, exposing a portion of the graphene layer structure;
(VI) depositing metal to form first and second electrical contacts, each in contact with the exposed graphene layer structure and an edge of the metal oxide layer;
(VII) removing the first photoresist;
(VIII) applying a second photoresist to the metal oxide layer and the first and second electrical contacts, and patterning it to provide a second masked region covering the first and second electrical contacts and a portion of the metal oxide layer;
(IX) etching the metal oxide layer to retain only the metal oxide layer beneath the second masked region, exposing a portion of the graphene layer structure;
(X) plasma etching the exposed portion of the graphene layer structure to retain only the graphene layer structure beneath the second masked region; and
(XI) removing the second photoresist.

### Claim 16 (depends on 13)

The method according to claim 13, wherein the precursor is obtained in a method which further comprises:
(xii-a) applying a third photoresist and patterning it to provide a third masked region on a portion of the metal oxide layer spaced apart from the first and second electrical contacts;
(xiii-a) forming a passivation layer on the first and second electrical contacts and adjacent unmasked metal oxide layer;
(xiv-a) removing the third photoresist.

### Claim 17 (depends on 16)

The method according to claim 16, wherein the precursor is obtained in a method which further comprises:
(xv-a) applying a fourth photoresist and patterning it to provide a mask on and across the passivation layer.

### Claim 18 (depends on 13)

The method according to claim 13, wherein the precursor is obtained in a method which further comprises:
(xii-b) applying a third photoresist and patterning it to provide a third masked region on the first and second electrical contacts and adjacent portions of the metal oxide layer.

### Claim at position 18

-20. (canceled)

### Claim 21 (depends on 3)

The graphene sensor according to claim 3, wherein the exposed sample surface of the graphene layer structure is functionalised.

### Claim 22 (depends on 21)

The graphene sensor according to claim 21, wherein the graphene sensor is a biosensor.

### Claim 23 (depends on 3)

The graphene sensor according to claim 3, wherein the thickness of the metal oxide layer is from 5 nm to 1 μm.