X-ray inspection system for inspection of an object
OwnerJohannes RUOFFinventor
Life of this patent
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Abstract
An X-ray inspection system serves for inspection of an object. An X-ray source of the system generates X-rays to propagate through a region of interest of the object. An object mount holds the object to be inspected such that the ROI is accessible for the generated X-rays. A detection system detects the X-rays after propagation through the ROI. The X-ray source generates a plurality of separate X-ray light bundles to propagate through the ROI. Chief rays of at least two of the generated separate X-ray light bundles impinge on the ROI of the object with different chief ray illumination angles. The detection system comprises separate detection areas to detect the separate X-ray light bundles, respectively. Such an inspection system can exhibit relatively fast image data acquisition.
Claims20
An X-ray inspection system configured to inspect an object, the X-ray inspection system comprising:
- an X-ray source configured to generate a plurality of separate X-ray light bundles;
- an object mount configured to hold the object so that separate X-ray light bundles propagate through a region of interest (ROI) of the object;
- and
- a detection system comprising separate detection areas configured to detect the separate X-ray light bundles, respectively, after propagating through the ROI,
- wherein the X-ray inspection system is configured so that:
- chief rays of at least two of the separate X-ray light bundles impinge on the ROI with different chief ray illumination angles;
- and
- X-ray light bundles with different chief ray illumination angles simultaneously impinge on the ROI.
A method of inspecting an object, the method comprising:
- impinging separate X-ray light bundles on a region of interest (ROI) of an object so that chief rays of at least two of the separate X-ray light bundles impinge on the ROI with different chief ray illumination angles, and so that X-ray light bundles with different chief ray illumination angles simultaneously impinge on the ROI;
- after the separate X-ray light bundles impinge on the ROI, detecting the separate X-ray light bundles at respective separate detection areas.
Dependencies are inferred from the claim text.