# US 2025/0146901 A1 · Phase detection device and method for optical element

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- Number: US 2025/0146901 A1
- Document ID: US20250146901A1
- Status: Published application
- Kind: A1
- Application number: 18/934,213
- Filed: 2024-10-31
- Published: 2025-05-08
- Earliest claimed: 2023-11-02
- Assignees: Shenzhen Metalenx Technology Co.,Ltd
- Applicants: Shenzhen Metalenx Technology Co.,Ltd
- Inventors: Jiaping CHENG; Junming DONG; Chenglong HAO; Fengze TAN; Jian ZHU
- Web page: https://patentgrep.com/patent/US20250146901A1

## CPC

- G01M 11/0271: {by using interferometric methods}
- G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR

## Abstract

A phase-detection device and method for an optical element are provided, along the direction of the optical path the phase-detection device includes: a light source, a beam collimator, a diffraction element and an imaging detector; the optical element is set between the filter and the diffraction element; the diffraction element includes a mesh mask region and an array region segmented by the mesh mask region; mesh mask region blocks lights of a target wavelength; the array region includes a first class of cell and a second class of cell, and the first class of cell and the second class of cell are alternatively arranged; the first class of cell provides a first phase for the lights of target wavelength, and the second class of cell provides a second phase for lights of target wavelength; a phase difference between the first phase and second phase is T rad.

## Claims

### Claim 1

A phase-detection device for an optical element, wherein along the direction of the optical path the phase-detection device comprises: a light source, a beam collimator, a diffraction element and an imaging detector;
the optical element to be detected is set between the filter and the diffraction element;
the diffraction element comprises a mesh mask region and an array region segmented by the mesh mask region; the mesh mask region is used to block lights of a target wavelength;
the array region comprises a first class of cell and a second class of cell, and the first class of cell and the second class of cell are alternatively arranged;
the first class of cell is used to provide a first phase for the lights of the target wavelength, and the second class of cell is used to provide a second phase for the lights of the target wavelength; a phase difference between the first phase and the second phase is TC rad;
the device further comprises a process; the process is communicatively connected to the imaging detector to determine a phase corresponding to the optical element according to an interference image recorded by the imaging detector.

### Claim 2 (depends on 1)

The phase-detection device for the optical element according to claim 1, wherein the optical element is a wafer-level optical element and the phase detection device comprises: a displacement platform, and the displacement platform comprise a carrier;
the wafer-level optical element comprises a plurality of sub-optical elements;
when the wafer-level optical element is mounted on the carrier, the wafer-level optical element is set on the optical path between the filter and the diffraction element.

### Claim 3 (depends on 2)

The phase-detection device for the optical element according to claim 2, wherein the phase detection device further comprises:
a platform base;
a bottom surface of the displacement platform is fixed to a top surface of the platform base;
an open hole is set on the bottom surface of the displacement platform, and the open hole is through the platform base simultaneously;
an open end of the platform base is set toward a side of the beam collimator; a cavity is set inside the platform base; a beam steering device is set inside the displacement platform;
the filter is set on the optical path, and is between the beam collimator and the top surface of the displacement platform;
the carrier is a tray, and the tray is set on the top surface of the displacement platform, and the tray is capable of moving parallel to the top surface of the displacement platform; the tray is set on the optical path between the filter and the diffraction element; the shape of the tray is a ring;
a step structure is set along an inner wall of the tray; the wafer-level optical element set on the tray by setting on the step structure;
the displacement platform comprises a carrier.

### Claim 4 (depends on 3)

The phase-detection device for the optical element according to claim 3, wherein a plurality of step structures are set along the inner wall of the tray.

### Claim 5 (depends on 3)

The phase-detection device for the optical element according to claim 3, wherein the inner wall of the tray comprises at least two ear structures, and the two ear structures are convex to an outer wall of the tray.

### Claim 6 (depends on 3)

The phase-detection device for the optical element according to claim 3, wherein there is at least one notch structure set on an edge of the wafer-level optical element; there is at least one projection structure set on an inner wall of the wafer-level optical element; when the wafer-level optical element is attached to the platform of the step structure, the projection structure is embedded in the notch structure.

### Claim 7 (depends on 3)

The phase-detection device for the optical element according to claim 3, wherein the beam steering device is a reflecting mirror.

### Claim 8 (depends on 3)

The phase-detection device for the optical element according to claim 3, wherein an aperture slot is set on the optical path between the beam collimator and the tray; and an aperture of the aperture slot is adjusted.

### Claim 9 (depends on 3)

The phase-detection device for the optical element according to claim 3, wherein the device comprises a bracket support, and the bracket support is set on a side of the displacement platform;
the bracket support comprises a support, and the bracket support is set on the displacement base;
the imaging detector is fixed to the support, and the imaging detector is vertically facing toward the displacement platform;
the diffraction element is set below the imaging detector.

### Claim 10 (depends on 9)

The phase-detection device for the optical element according to claim 9, wherein the bracket support comprises a top surface of the bracket support fixed to the platform base and at least three support rods;
the bracket support is a dome bracket;
the dome bracket is set over the displacement platform;
and the imaging detector is fixed to the center of the dome bracket.

### Claim 11 (depends on 1)

The phase-detection device for the optical element according to claim 1, wherein the beam collimator is a reflective collimator.

### Claim 12 (depends on 1)

The phase-detection device for the optical element according to claim 1, wherein the diffraction element is a hybrid grating, and the hybrid grating comprises a mesh mask grating and a 2D array grating;
in the 2D array grating, a height difference between the first class of cell and the second class of cell is λ/2(n−1);
wherein, λ is a target wavelength, n is a refractive index of the 2D array grating at the target wavelength.

### Claim 13 (depends on 12)

The phase-detection device for the optical element according to claim 12, wherein an antireflection film is coating on one surface facing toward an incident light of the 2D array grating.

### Claim 14 (depends on 1)

The phase-detection device for the optical element according to claim 1, wherein a distance between the diffraction element and the imaging detector is greater than or equal to 1 mm, and is less than or equal to 5 cm.

### Claim 15 (depends on 9)

The phase-detection device for the optical element according to claim 9, wherein the diffraction element is fixed below the imaging detector by the support.

### Claim 16 (depends on 9)

The phase-detection device for the optical element according to claim 9, wherein the diffraction element is fixed below the imaging detector by a structural element of the imaging detector.

### Claim 17 (depends on 16)

The phase-detection device for the optical element according to claim 16, wherein the structural element is a tubular structural element, and the tubular structural element comprises an inner wall of threads;
the outer wall of the imaging detector comprises threads, and the tubular structural element is set on the outer wall of the imaging detector by threads;
the tubular structural element extends downward to the outer wall of the imaging detector and the diffraction element is fixed to the inner wall of the tubular structural element outside the imaging detector, so that the diffraction element is fixed below the imaging detector.

### Claim 18 (depends on 1)

A phase detection method for a wafer-level optical element, wherein the method is applied to the phase detection device claimed as claim 1, when a wafer-level optical element is mounted to a carrier of the displacement platform, along the direction of the optical path the phase detection device comprises: a light source, a beam collimator, a filter, a wafer-level optical element, a diffraction element and an imaging detector;
when a light is incident to the wafer-level optical element, the radius of the light coverage area is greater than or equal to a radius of each sub-optical element, and is less than or equal to the distance between the edge and the center of each wafer-level optical element;
a plurality of edge sub-optical elements at the edge of the wafer-level optical element are pre-calibrated;
the method comprises:
when the reset of the carrier is completed and the wafer-level optical element is mounted on the carrier, controlling the movement of the carrier until the interference image corresponding to the edge sub-optical elements is detected and obtained;
correcting a position of the carrier by setting a target that a center deviation between the interference image of the edge sub-optical element and an image of the imaging detector is less than a pre-set threshold, so as to make the wafer-level optical elements at an initial target attitude and an initial target position;
when the correction of the carrier is completed, the carrier is controlled to sequentially move each sub-optical element of the wafer-level optical element to a position at the center of the imaging detector to perform a phase detection of the sub-optical elements based on the corresponding interference image of the sub-optical elements.

### Claim 19 (depends on 18)

The method according to claim 18, wherein along the direction of the optical path, there is an aperture slot set on the optical path between the light source and the optical element, and the wafer-level optical element comprises optical elements with two kinds of radius;
the method further comprises: when the interference images read a command, determining a target sub-optical element corresponding to the interference image to be read, and adjusting the aperture of the aperture slot based on the distance between the target sub-optical element and the adjacent sub-optical element, so that the radius of the spot on the wafer-level optical element is greater than or equal to the radius of the target sub-optical element, and less than or equal to the distance between the center of the target sub-optical element and the edge of the adjacent sub-optical element.

### Claim 20 (depends on 18)

The method according to claim 18, wherein there is an aperture slot set on the optical path and is between the light source and the optical element, and each sub-optical element has the same radius;
the method further comprises: when the wafer-level optical element is mounted on the carrier, adjusting the aperture of the aperture slot according to the radius of each sub-optical element and the distance between each sub-optical element and adjacent sub-optical element, so as to make the radius of the spot that the lights projects on the wafer-level optical element greater than or equal to the radius of the sub-optical element, and less than or equal to the distance between the center of the sub-optical element and edge of the adjacent sub-optical elements.