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US 2025/0146166 A1Published application
Electrolytic Cell with Electrically Neutral and Conductive Sieve
AssigneeClassOne Technology
InventorsCody Carter, John Ghekiere, Branden Bates, Alan Murray, Trevor Jobst
Life of this patent
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Abstract
An electrochemical deposition fountain reactor for processing spinning semiconductor wafers can include a perforated ionic membrane near the wafer surface through which electrolyte flows. This allows high velocity electrolyte jets to impinge the wafer surface at low bulk flow rates, which reduces the boundary layer at the wafer surface and allows for better replenishment of ions at the wafer surface.
Claims15
An electrolytic cell comprising:
- an electrochemical reactor including a housing defining a chamber and an electrically neutral and conductive sieve mounted within the chamber and configured to direct jets of electrolyte toward a workpiece that is configured to rotate within the chamber.
An electrochemical deposition apparatus comprising:
- a disk-shaped electrically neutral and conductive sieve configured to be mounted within an electrochemical reactor in a spaced relationship from a rotating semiconductor wafer associated with the electrochemical reactor, and defining a plurality of perforations configured to direct jets of electrolyte toward the rotating semiconductor wafer that disrupt a boundary layer of electrolyte at a surface of the rotating semiconductor wafer.
Dependencies are inferred from the claim text.