Coating film-attached glass, production method therefor, and modified glass substrate

A production method for coating film-attached glass in which a coating film is formed on at least a part of a surface of a glass substrate, the method comprising:

• a modification step of forming a modified layer in a region at a depth of 100 nm from the surface of the glass substrate on a side on which the coating film is provided in the depth direction;
• and
• a film formation step of forming the coating film on the surface of the glass substrate on which the modified layer is formed,
• wherein the modification step includes at least any one step of (i) a step of blasting a flame generated by burning low hydrocarbon gas in the presence of oxygen gas from a burner to apply a portion rich in plasma in the flame to be blasted from the burner to the surface of the glass substrate on the side on which the coating film is provided, (ii) a step of performing a laser treatment with respect to the surface of the glass substrate on the side on which the coating film is provided, and (iii) a step of performing a high-temperature gas treatment with respect to the surface of the glass substrate on the side on which the coating film is provided,
• wherein the film formation step is a step of turning raw material gas containing at least hydrocarbon-based gas into plasma to form an amorphous coating film containing at least carbon as the coating film on the surface of the glass substrate on the side on which the coating film is provided, and
• the raw material gas includes at least one kind selected from the group comprising hexafluoroethane, C6F10(CF3)2, C6F6, tetrafluoromethane, and octafluoropropane.