Back to results
US 2025/0145514 A1Published application
Electrostatic clamping of electrically insulating substrates
AssigneeNIL Technology ApS
InventorsBrian Bilenberg, Sören Fricke, Lars Hagedorn Frandsen
Life of this patent
Estimating the term…
Abstract
In an example implementation, an apparatus includes an electrically insulating substrate, optical elements in or on the substrate, and electrically conductive material on a surface of the substrate and laterally surrounding at least some of the optical elements. The electrically conductive material facilitates clamping of the electrically insulating substrate to an electrostatic chuck.
Claims17
An apparatus comprising:
- an electrically insulating substrate;
- a plurality of optical elements in or on the substrate;
- electrically conductive material on a surface of the substrate and laterally surrounding at least some of the optical elements,
- an electrostatic chuck, wherein the electrically insulating substrate is clamped to the electrostatic chuck, and wherein the electrically conductive material provides an electrically conductive surface to facilitate electrostatic clamping to the electrostatic chuck.
1 more element
An apparatus comprising:
- an electrically insulating substrate;
- a plurality of optical elements in or on a first side of the substrate;
- electrically conductive material forming a grid on a second side of the substrate, the second side being an opposite side of the substrate from the first side;
- an electrostatic chuck, wherein the electrically insulating substrate is clamped to the electrostatic chuck, and wherein the electrically conductive material provides an electrically conductive surface to clamp the substrate electrostatically to the electrostatic chuck.
1 more element
A method comprising:
- clamping an electrically insulating substrate to an electrostatic chuck, wherein a surface of the electrically insulating substrate has electrically conductive material thereon, wherein the electrically conductive material forms at least one of rings, lines or a grid on the surface;
- and
- performing at least one process to the electrically insulating substrate while it is clamped to the chuck.
Dependencies are inferred from the claim text.