US 2025/0145431 A1 · CATHODE EXCHANGE MECHANISM TO IMPROVE PREVENTATIVE MAINTENANCE TIME FOR CLUSTER SYSTEM

Abstract

A method and apparatus for lifting a process station from a processing module is described herein. The apparatus includes a lift assembly disposed on the processing module, a lift cage, and one or more guide pins. The lift assembly is disposed to be capable of reaching each of the process stations disposed within the processing module. The lift assembly is used for replacement and maintenance of the process stations and further enables the automated removal and placement of the process stations within the processing module. Maintenance methods enabled by the lift assembly are additionally disclosed herein.

Claims20

Dependent claims

A method of transferring a processing station for maintenance comprising:

coupling a lift cage to a first processing station of a plurality of processing stations disposed on a processing module, the first processing station being in a first position and comprising:
a source assembly;
positioning an arm assembly of a lift assembly over the processing station, the lift assembly being disposed on top of the processing module between a plurality of the processing stations;
coupling a lift clasp of the arm assembly to a cage clasp of the lift cage;
removing a portion of the first processing station from a position on the processing module;
and
positioning the portion of the first processing station in a second position different from the first position.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

19/013,922Filed 8 Jan 2025

Priority

2 Feb 2021

Published

8 May 2025

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

B66C 5/10
Base supporting structures with legs: portals, i.e. essentially circular or square platforms with three or more legs specially adapted for…
B66F 3/36
Constructional features: load-engaging elements
B66C 17/04
Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers…:…
B66C 17/06
Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers…:…

Cathode exchange mechanism to improve preventative maintenance time for cluster system

Life of this patent

Cathode exchange mechanism to improve preventative maintenance time for cluster system

Life of this patent

Abstract

Claims20