Liquid discharge apparatus, liquid discharge method, molding apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorKOSEI ITO
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorKOSEI ITO
Estimating the term…
A liquid discharge apparatus includes a substrate stage configured to move while holding a substrate, a discharge unit including nozzles for discharging a liquid, a control unit configured to control the discharge unit to discharge the liquid from the discharge unit, and a position acquisition unit configured to acquire a position of a movement target object at a predetermined timing while the substrate stage or the discharge unit is moved as the movement target object. The control unit controls a discharge timing for discharging the liquid from the discharge unit, based on a difference between the position of the movement target object acquired by the position acquisition unit at the predetermined timing and a target position of the movement target object at the predetermined timing.
A liquid discharge apparatus comprising:
A liquid discharge method comprising:
Dependencies are inferred from the claim text.