Bonding method and bonding apparatus
AssigneeTokyo Electron Limited
InventorsHirokazu UEDA, Kenji SEKIGUCHI, Mitsuaki IWASHITA
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Abstract
A bonding method includes a first operation of preparing a first substrate having a first surface and a second substrate having a second surface, each of the first surface and the second surface having a first region in which an insulating film is exposed and a second region in which a conductive film is exposed, a second operation of applying an ionic liquid to at least one of the first surface of the first substrate or the second surface of the second substrate, and a third operation of bonding the first surface of the first substrate and the second surface of the second substrate with the ionic liquid.
Claims13
A bonding method, comprising:
- a first operation of preparing a first substrate having a first surface and a second substrate having a second surface, each of the first surface and the second surface having a first region in which an insulating film is exposed and a second region in which a conductive film is exposed;
- a second operation of applying an ionic liquid to at least one of the first surface of the first substrate or the second surface of the second substrate;
- and
- a third operation of bonding the first surface of the first substrate and the second surface of the second substrate with the ionic liquid.
A bonding apparatus, comprising:
- an application mechanism configured to apply an ionic liquid to at least one of a first surface of a first substrate or a second surface of a second substrate, each of the first surface and the second surface having a first region in which an insulating film is exposed and a second region in which a conductive film is exposed;
- a first holder and a second holder configured to hold the first surface of the second substrate and the second surface of the second substrate so as to face each other;
- and
- a driver configured to bring the second substrate and the second substrate into close contact with each other by allowing the first holder and the second holder to approach each other relatively.
Dependencies are inferred from the claim text.