Polishing pad with excellent recyclability and pyrolysis oil obtained therefrom
AssigneeSK enpulse Co., Ltd.
InventorsYounghwan KIM, Jongwook YOON, Jangwon SEO
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Abstract
The embodiment relates to a polishing pad that comprises a polishing layer. When pyrolysis oil obtained by pyrolyzing the polishing layer at 320° C. for 6 hours is analyzed by combustion-ion chromatography (C-IC) in accordance with the IEC 62321-3-2 standard, the content of chlorine (CI) is less than 10,000 ppm. Further, the pyrolysis oil can be used as a high-quality energy source through a refining process.
Claims13
A polishing pad, which comprises a polishing layer, wherein, when pyrolysis oil obtained by pyrolyzing the polishing layer at 320° C. for 6 hours is analyzed by combustion-ion chromatography (C-IC) in accordance with the IEC 62321-3-2 standard, the content of chlorine (Cl) is less than 10,000 ppm.
Dependencies are inferred from the claim text.