Polishing pad, method for producing polishing pad, and method for polishing surface of optical material or semiconductor material
AssigneeFujibo Holdings, Inc.
InventorsYoshihide KAWAMURA, Teppei TATENO, Hiroshi KURIHARA, Satsuki NARUSHIMA, Yamato TAKAMIZAWA, Keisuke OCHI, Tetsuaki KAWASAKI
Life of this patent
Estimating the term…