Vibration reduction in ion implanters using embedded actuator forced attenuation
AssigneeApplied Materials, Inc.
InventorsJordan B. TYE, Craig Richard CHANEY, Jack Joseph LOPICCOLO, James P. BUONODONO
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Abstract
A vibrating actuator adapted to be installed within a component of an ion implanter, the vibrating actuator including a housing defining an internal cavity, and a vibrating mechanism disposed within the internal cavity, the vibrating mechanism including an actuating element and a vibratory element coupled to the actuating element, wherein when an electrical signal is applied to the actuating element, the actuating element moves the vibratory element to vibrate the housing.
Claims27
A vibrating actuator adapted to be installed within a component of an ion implanter, the vibrating actuator comprising:
- a housing defining an internal cavity;
- and
- a vibrating mechanism disposed within the internal cavity, the vibrating mechanism comprising:
- an actuating element;
- and
- a vibratory element coupled to the actuating element;
- wherein, when an electrical signal is applied to the actuating element, the actuating element moves the vibratory element to vibrate the housing.
A system for reducing unwanted vibration in a component of an ion implantation system, the system comprising:
- a vibrating actuator sealed within the component, the vibrating actuator comprising:
- a housing defining an internal cavity;
- a vibrating mechanism disposed within the internal cavity, the vibrating mechanism comprising:
- an actuating element;
- and
- a vibratory element coupled to the actuating element;
- wherein, when an electrical signal is applied to the actuating element, the actuating element moves the vibratory element to vibrate the housing and the component.
A method of embedding a vibrating actuator within a component of an ion implantation system, the method comprising:
- starting an additive manufacturing process to build the component, including forming an internal cavity within the component;
- pausing the additive manufacturing process while the internal cavity is still open;
- installing the vibrating actuator within the internal cavity;
- and
- restarting the additive manufacturing process to cap the internal cavity and seal the vibrating actuator within the internal cavity.
A system for reducing unwanted vibration in a component of an ion implantation system, the system comprising:
- a vibrating actuator sealed within the component, the vibrating actuator comprising:
- a housing defining an internal cavity;
- and
- a vibrating mechanism disposed within the internal cavity, the vibrating mechanism adapted to vibrate in response to an external vibration to interfere with the external vibration.
Dependencies are inferred from the claim text.