# US 2025/0144574 A1 · Filtration membranes, systems, and methods for producing purified water

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- Number: US 2025/0144574 A1
- Document ID: US20250144574A1
- Status: Published application
- Kind: A1
- Application number: 19/017,111
- Filed: 2025-01-10
- Published: 2025-05-08
- Earliest claimed: 2020-10-09
- Assignees: Entegris, Inc.
- Applicants: Entegris, Inc.
- Inventors: James Hamzik; Siddarth Sampath; Justin Brewster; Ashutosh Shrikant Bhabhe
- Web page: https://patentgrep.com/patent/US20250144574A1

## CPC

- B01D 69/1216: {Three or more layers}
- C02F 1/444: {by ultrafiltration or microfiltration}
- B01D 61/18: Apparatus therefor
- B01D 67/00931: {by introduction of specific groups after membrane formation, e.g. by grafting}
- B01D 67/00933: {by addition of a layer chemically bonded to the membrane}
- B01D 69/02: characterised by their properties
- B01D 69/1214: {Chemically bonded layers, e.g. cross-linking}
- B01D 71/261: {Polyethylene}
- B01D 71/262: {Polypropylene}
- B01D 71/82: characterised by the presence of specified groups, e.g. introduced by chemical after-treatment
- C02F 1/42: by ion-exchange (ion-exchange in general B01J)
- C02F 1/44: by dialysis, osmosis or reverse osmosis {(general membrane separation processes B01D61/00, membrane modules B01D63/00, electrodialysis C02F1/4693, combination of membrane modules and bioreactors C02F3/1268)}
- B01D 2311/06: Specific process operations in the permeate stream
- B01D 2311/2623: Ion-Exchange
- B01D 2323/36: Introduction of specific chemical groups
- C02F 1/288: {using composite sorbents, e.g. coated, impregnated, multi-layered}
- C02F 2101/108: {Boron compounds}
- C02F 2101/20: Heavy metals or heavy metal compounds
- C02F 2101/203: {Iron or iron compound}
- C02F 2101/30: Organic compounds
- C02F 2101/308: {Dyes; Colorants; Fluorescent agents}
- C02F 2103/04: for obtaining ultra-pure water
- B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28)
- C02F: TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE (separation in general B01D; special arrangements on waterborne vessels of installations for treating water, waste water or sewage, e.g. for producing fresh water, B63J; adding materials to water to prevent corrosion C23F; treating radioactively-contaminated liquids G21F9/04; regeneration of reactants for recirculation into processes, see the relevant places for the processes)

## Abstract

Described are filter membranes, related systems, and related method useful for producing purified (e.g., ultrapure) water, including membranes, systems, and methods of preparing purified water that will be useable in processes of manufacturing electronic and semiconductor devices.

## Claims

### Claim 1

A system useful for removing an impurity from a flow of source water, the system comprising:
(i) a first porous polymeric filter membrane having attached thereon an amino polyol ligand comprising three or more hydroxyl groups;
(ii) a second porous polymeric filter membrane configured to remove solid particulate contaminants; and
(iii) an ion-exchange resin.

### Claim 2 (depends on 1)

The system of claim 1, wherein the amino polyol ligand comprising three or more hydroxyl groups is N-methyl-D-glucamine.

### Claim 3 (depends on 1)

The system of claim 1, wherein the second porous polymeric filter membrane has quaternary ammonium attached thereon.

### Claim 4 (depends on 1)

The system of claim 1, wherein the first porous polymeric filter membrane has a pore size characterized by a bubble point in a range from 4 psi to 160 psi, the bubble point measured using ethoxy-nonafluorobutane HFE 7200 at a temperature of 20-25° C.

### Claim 5 (depends on 1)

The system of claim 1, wherein the first porous polymeric filter membrane is characterized as having a dye binding capacity of greater than 100 μg/cm2.

### Claim 6 (depends on 1)

The system of claim 1, wherein the first porous polymeric filter membrane is characterized as having a dye binding capacity of 120 μg/cm2.

### Claim 7 (depends on 1)

The system of claim 1, wherein the first porous polymeric filter membrane comprises a polyolefin or a halogenated polymer.

### Claim 8 (depends on 1)

The system of claim 1, wherein the first porous polymeric filter membrane comprises ultra-high molecular weight polyethylene.

### Claim 9 (depends on 1)

The system of claim 1, wherein the first porous polymeric filter membrane comprises polytetrafluoroethylene.

### Claim 10 (depends on 1)

The system of claim 1, wherein the second porous polymeric filter membrane has a pore size characterized by a bubble point in a range from 4 psi to 160 psi, the bubble point measured using ethoxy-nonafluorobutane HFE 7200 at a temperature of 20-25° C.

### Claim 11 (depends on 10)

The system of claim 10, wherein the bubble point is in a range from 30 psi to 60 psi.

### Claim 12 (depends on 1)

The system of claim 1, wherein the second porous polymeric filter membrane is characterized as having a dye binding capacity of at least 10 μg/cm2.

### Claim 13 (depends on 1)

The system of claim 1, wherein the second porous polymeric filter membrane comprises a polyolefin or a halogenated polymer.

### Claim 14 (depends on 1)

The system of claim 1, wherein the second porous polymeric filter membrane comprises ultra-high molecular weight polyethylene.

### Claim 15 (depends on 1)

The system of claim 1, wherein the second porous polymeric filter membrane comprises polytetrafluoroethylene.