Optical sensing apparatus
OwnerYun-Chung Na, You-Ru Lin +2inventors
InventorsYun-Chung Na, You-Ru Lin, Tsung-Ting Wu, Yu-Hsuan Liu
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Abstract
Methods, devices, and systems for optical sensing are provided. In one aspect, an optical sensing apparatus includes: a first absorption region configured to absorb light in at least a first spectrum with visible or near infrared wavelengths; a second absorption region formed over the first absorption region, the second absorption region configured to absorb light in at least a second spectrum with near infrared or shortwave infrared wavelengths; and a third absorption region formed over the second absorption region, the third absorption region configured to absorb light in at least a third spectrum with shortwave infrared or mid-wave infrared wavelengths.
Claims20
An optical sensing apparatus comprising:
- a first absorption region configured to absorb light in at least a first spectrum with visible or near infrared wavelengths;
- a second absorption region formed over the first absorption region, the second absorption region configured to absorb light in at least a second spectrum with near infrared or shortwave infrared wavelengths;
- and
- a third absorption region formed over the second absorption region, the third absorption region configured to absorb light in at least a third spectrum with shortwave infrared or mid-wave infrared wavelengths.
An optical sensing apparatus comprising:
- a plurality of sensing areas, each sensing area comprising:
- a first absorption region configured to absorb light in at least a first spectrum with visible or near infrared wavelengths;
- a second absorption region formed over the first absorption region, the second absorption region configured to absorb light in at least a second spectrum with near infrared or shortwave infrared wavelengths;
- and
- a third absorption region formed over the second absorption region, the third absorption region configured to absorb light in at least a third spectrum with shortwave infrared or mid-wave infrared wavelengths.
A method of forming an optical sensing apparatus, comprising:
- forming a first absorption region configured to absorb light in at least a first spectrum with visible or near infrared wavelengths;
- forming a second absorption region formed over the first absorption region, the second absorption region configured to absorb light in at least a second spectrum with near infrared or shortwave infrared wavelengths;
- and
- forming a third absorption region formed over the second absorption region, the third absorption region configured to absorb light in at least a third spectrum with shortwave infrared or mid-wave infrared wavelengths.
An optical sensing apparatus comprising:
- a n-doped silicon layer;
- a silicon layer formed over the n-doped silicon layer;
- a p-doped silicon layer formed over the silicon layer;
- a first p-doped germanium layer formed over the p-doped silicon layer;
- a superlattice structure formed over the p-doped germanium layer, the superlattice structure comprising multiple alternating Ge1-xSnx and Ge1-ySiy layers, where x and y is between 0 and 1;
- and
- a second p-doped germanium layer formed over the superlattice structure.
Dependencies are inferred from the claim text.