Wiring substrate production method, wiring substrate, reticle, and exposure pattern-rendering data structure

A wiring substrate, comprising:

• a support body;
• a plurality of metal wirings placed on the support body;
• and
• at least one dummy metal structure that surrounds at least a part of the plurality of metal wirings,
• wherein a width of the metal wiring in a short direction is 20 μm or less,
• at least a part of the dummy metal structure is located in a region within 200 μm from a wiring electrode closest to the dummy metal structure among the plurality of metal wirings, and
• the dummy metal structure includes at least one among a mesh-shaped dummy metal structure in which a plurality of lines are arranged in a lattice shape, an inner dummy metal structure located between the plurality of metal wirings, and a dummy metal structure in which a plurality of dot-shaped electrodes are arranged to surround at least a part of the plurality of metal wirings.

A reticle for exposing a resist, comprising:

• a wiring exposure pattern;
• and
• a dummy exposure pattern in which at least a part is located within 200 μm from an end portion of the wiring exposure pattern,
• wherein the dummy exposure pattern includes at least one among a mesh shape in which a plurality of lines are arranged in a lattice shape, and a dot shape in which a plurality of dots are arranged.

A non-transitory computer-readable storage medium storing an exposure drawing data structure for an exposure apparatus for exposing a resist layer, the exposure drawing data structure comprising:

• wiring exposure data configured to draw a wiring exposure pattern by the exposure apparatus;
• and
• dummy exposure data configured to draw a dummy exposure pattern by the exposure apparatus, at least a part of the dummy exposure pattern being located within 200 μm from an end portion of the wiring exposure pattern,
• wherein the dummy exposure pattern includes at least one of a mesh shape in which a plurality of lines are arranged in a lattice shape, and a dot shape in which a plurality of dots are arranged.