Recipe Creating System, Length Measurement System, and Recipe Creating Method

A measurement system comprising:

• a recipe creation system that creates a recipe describing a procedure of measuring an observation target by a first computer system;
• and
• a charged particle beam apparatus that executes the recipe by a second computer system and measures the observation target,
• wherein the first computer system includes
• a storage process of storing design data of the observation target including a plurality of layers in a storage device;
• a layer setting process of setting one or more layers from the plurality of layers for each image acquisition condition of the observation target;
• and
• a measurement cursor setting process of setting a measurement cursor indicating a measurement area of the observation target in a design image configured with designs existing in the one or more layers set by the layer setting process, and
• the second computer system executes:
• a reception process of receiving the design image;
• and
• a display process of displaying a SEM image captured by imaging the measurement area indicated by the measurement cursor and the design image received by the reception process.

A recipe creation method of creating a recipe describing a procedure of measuring an observation target, the method comprising:

• storing design data of the observation target including a plurality of layers in a storage device;
• setting one or more layers from the plurality of layers for each image acquisition condition of the observation target;
• setting a measurement cursor indicating a measurement area of the observation target to a design image configured by a design existing in the one or more set layers;
• and
• creating a recipe including the image acquisition condition and the set measurement cursor.