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US 2025/0138240 A1Published application
Metastable Strained Ferroelectric Device
OwnerJean Fompeyrine, Alan Molinari +4inventors
InventorsJean Fompeyrine, Alan Molinari, Martin George Friedl, Timo Schumann, Astrid Mona Josephine Norberg, Ruggero Frison
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Abstract
An electro-optic method and device fabricated with a metastable phase of BTO. The metastable tetragonal crystalline phase of BTO is preserved using direct wafer bonding on a thick SiO2 lower cladding layer for optical confinement in the active BTO.
Claims16
An electro-optic device comprising:
- strained Pockels material stabilized in a metastable structure;
- a lower optical cladding layer and possibly an upper cladding layer and/or electrodes.
A method for fabricating an electro-optic device comprising:
- forming a Pockels material on a tensile strain inducing layer that induces a tensile strain in the Pockels material;
- transferring the Pockels material to a lower cladding layer;
- and
- forming an electrooptical device including the Pockels material and possibly upper cladding layers and/or electrodes.
1 more element
Dependencies are inferred from the claim text.