Vacuum getter pump with thermo-sedimentational activation
OwnerKonstantin Anatoly CHUNTONOV, Alla Pavel CHUNTONOV +1inventors
InventorsKonstantin Anatoly CHUNTONOV, Alla Pavel CHUNTONOV, Juan DE LA FIGUERA BAYÓN
Life of this patent
Estimating the term…
Abstract
The new ultra- and extreme high vacuum getter pump with an ultimate pressure of 10−14 mbar and the absence of free solid particles is also distinguished by its simplicity of design and low-cost getter material. Unlike known getter pumps, a new, dust-free solution to the problem of capturing gases with getters reactants is achieved through the use of two types of sorbing boundaries, gas/solid and gas/melt, as well as due to thermo-sedimentational activation of the getter material.
Claims6
A getter vacuum pump or a pumping system in the form of two such pumps, wherein either of said pumps is a steel cylindrical container with a flange, with getter material inside and an external heater, and wherein said pumps create a pressure of the order of 10−10-10−14 mbar in the evacuated vacuum chamber without generating free solid particles.
Dependencies are inferred from the claim text.