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US 2025/0137140 A1Published application
Method of metallization with a nickel or cobalt alloy for the manufacture of semiconductor devices
AssigneeMacDermid Enthone Inc.
InventorsVincent MEVELLEC, Yeeseul KIM, Louis CAILLARD
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Abstract
A method of metallizing a dielectric substrate with a nickel-boron alloy or cobalt-boron alloy to deposit a thin layer of the alloy that exhibits good conductivity. The process includes an activation step that includes two stages of activation with a noble metal such as palladium. Thereafter, the dielectric substrate is metallized with a nickel-boron or cobalt-boron alloy by electroless deposition.
Claims19
A process for metallizing a mineral oxide substrate with a nickel-boron or cobalt-boron alloy, said metallization process comprising:
- a) activating one or more surfaces of the mineral oxide substrate with a noble metal, wherein the activation step comprises:
- i. a first activation stage comprising the step of activating the surface of the mineral oxide substrate by contacting the surface of the mineral oxide substrate with a first activation solution, the first activation solution comprising a solvent, a noble metal complex with a complexing agent, and an organo-silane bi-functional binder, and thereafter
- ii. a second activation stage comprising the step of activating the surface of the mineral oxide substrate by contacting the surface of the mineral oxide substrate with a second activation solution, the second activation solution comprising an aqueous solution of acidic pH comprising noble metal ions;
- and
- b) contacting the one or more surfaces of the mineral oxide substrate, in the absence of electrical polarization, with an electroless aqueous solution comprising one or more of nickel ions and cobalt ions and a reducing agent comprising boron, to form a nickel-boron or cobalt-boron alloy layer on the surface of the mineral oxide substrate.
2 more elements
Dependencies are inferred from the claim text.