Imprint apparatus, imprint method, and manufacturing method of article

Abstract

To reduce an occurrence of a defect and a shear force occurring between a mold and a substrate, an imprint apparatus that brings a curable composition on a substrate and a mold into contact with each other to be cured, and molds the curable composition into a pattern shape of the mold includes an irradiation unit configured to irradiate the curable composition on the substrate with a first energy to increase a viscosity of the curable composition and a second energy to cure the curable composition, and a control unit configured to control the irradiation unit such that the curable composition on a specific region that is a part of a molding region of the substrate is irradiated with the first energy before the mold and the curable composition are brought into contact with each other, and the curable composition over an entire molding region of the substrate is irradiated with the second energy after the mold and the curable composition are brought into contact with each other.

Dependencies are inferred from the claim text.