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US 2025/0132065 A1Published application
Deformable mirror and x-ray device
AssigneeNational University Corporation Tokai National Higher Education and Research System
InventorSatoshi MATSUYAMA
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Abstract
A deformable mirror includes a first substrate having a first surface and a second surface opposite to the first surface and made of a piezoelectric material; a reflecting electrode provided in the first surface and having a reflecting surface on which an X-ray is obliquely incident; a plurality of control electrodes arranged at intervals in a predetermined direction in the second surface; and a power supply structured to apply a voltage between the reflecting electrode and the plurality of control electrodes.
Claims20
A deformable mirror comprising:
- a first substrate having a first surface and a second surface opposite to the first surface and made of a piezoelectric material;
- a reflecting electrode provided in the first surface and having a reflecting surface on which an X-ray is obliquely incident;
- a plurality of control electrodes arranged at intervals in a predetermined direction in the second surface;
- and
- a power supply structured to apply a voltage between the reflecting electrode and the plurality of control electrodes.
2 more elements
Dependencies are inferred from the claim text.