Pressure sensor having improved rejection of undesired stimuli

A pressure sensor, comprising:

• a first substrate including a surface;
• a first chamber extending into the surface of the first substrate;
• a second chamber extending into the surface of the first substrate;
• a wall portion between the first chamber and the second chamber, the wall portion partially delimits the first chamber and partially delimit the second chamber;
• a bonding region on the surface of the first substrate;
• a second substrate coupled to the first substrate by the bonding region;
• a first elastic element extends from the wall portion into the first chamber;
• a second elastic element extends from the wall portion into the second chamber;
• a first detection structure coupled to the first elastic element;
• a second detection structure coupled to the second elastic element;
• a first buried cavity within the first detection structure;
• a first channel in fluid communication with the first buried cavity, extends through the first elastic element, and extends through the wall portion;
• a first opening extends into the surface, is in fluid communication with the second chamber, and is fluidically coupled to the first channel;
• a second buried cavity within the second detection structure;
• a second channel in fluid communication with the second buried cavity, extends through the second elastic element, and extends through the wall portion;
• and
• a second opening extends into the surface, is in fluid communication with the first chamber, and is fluidically coupled to the second channel.

A pressure sensor, comprising:

• a first substrate including a surface, a first chamber that extends into the surface, and a wall portion that partially delimits the first chamber;
• a first elastic element extends from the wall portion into the first chamber;
• a first detection structure coupled to the first elastic element, the first detection structure is suspended within the first chamber by the first elastic element;
• a first buried cavity within the first detection structure;
• a first channel in fluid communication with the first buried cavity, the first channel extends through the first elastic element and extends through the wall portion;
• and
• a first opening extends into the surface, the first opening is in fluid communication with the second chamber and is fluidically coupled to the first channel.